Femtosecond laser induced hybrid additive/subtractive manufacturing for programmable silver micro/nanostructures

Metallic micro/nanostructures have been playing significant roles in functional micro/nanodevices. Here, a hybrid additive and subtractive manufacturing technology of metal micro/nanostructures combining femtosecond laser multiphoton photoreduction with femtosecond laser induced chemical etching is proposed. The additive manufacturing of silver (Ag) wires with high-qualities and erasure of additively manufactured wires were all systematically investigated. An Ag wire with a feature width of 78 nm was achieved by using this hybrid additive and subtractive manufacturing technology. Several micro/nanostructures were also fabricated or amended based on this technology. This technology provides an important method for the fabrication of metal micro/nanostructures with high precisions and performances. At the same time, it also provides a technical scheme for the modification of micro/nano scale electronic circuits or related devices.