基于表面声波的气体传感器研究进展

Qiming Yang , Baile Cui , Jing Jin , Lina Cheng , Xufeng Xue , Yining Yin , Wen Wang
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引用次数: 0

摘要

表面声波(SAW)气体传感器作为一种新兴的传感技术,由于其独特的微纳米尺度声传感结构和多物理场耦合机制,具有灵敏度高、响应速度快、探测范围宽、重量轻等特点而备受关注。本文系统地综述了声表面波气体传感的作用和机理、传感装置的设计与制造、信号采集与处理电路。讨论了该技术在可再生能源、航空航天、国防、工业控制、智能制造等领域的潜在应用,并对未来发展趋势进行了展望。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Review of surface acoustic wave-based gas sensors
Surface acoustic wave (SAW) gas-based sensors have attracted significant attention as an emerging sensing technology due to their unique micro/nano-scale acoustic sensing structures and multi-physical field coupling mechanisms, which feature high sensitivity, rapid response, wide detection range, and lightweight. This paper systematically reviews the SAW gas sensing effect and mechanisms, sensing device design and fabrication, signal acquisition and processing circuits. Potential applications in fields such as renewable energy, aerospace, defense, industrial control, and intelligent manufacturing are also discussed, followed by an outlook on future development trends.
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CiteScore
17.40
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