基于负刚度解耦的柔性驱动平台性能改进方法及其在快速转向镜中的应用

IF 4.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Sensors and Actuators A-physical Pub Date : 2025-07-19 DOI:10.1016/j.sna.2025.116877

Fanhui Meng , Bo Qi , Zijian Jing , Jin Wang , Huijing Liu

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引用次数: 0

摘要

针对使用柔性驱动平台引起的模态频率耦合问题，提出了一种基于负刚度的柔性机构设计方法。该方法为提高采用柔性机构的设备的性能提供了新的途径。在此基础上，首次采用负刚度柔性机构设计了直径为120 mm的负刚度快速转向镜。试验结果表明，FSM既能降低一阶模态频率，又能提高二阶模态频率。此外，负刚度的使用导致了工作方向刚度的减小和工作范围的增大。采用简单的闭环控制算法对设计的FSM进行实验，得到闭环控制带宽为213.1 Hz。综上所述，该设计方法首次实现了柔性机构的频率解耦，为利用柔性机构提高设备性能提供了一种新的方法。

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A flexible drive platform performance improvement method based on negative stiﬀness decoupling and its application in fast steering mirror

To address the modal frequency coupling issues caused by the use of flexible drive platform, this study proposes a design method for flexible mechanisms based on negative stiﬀness. This method oﬀers a new approach to improve the performance of equipment which using flexible mechanisms. On the basis of this method, a negative stiﬀness-based FSM (Fast Steering Mirror) with a 120 mm diameter mirror was designed for the first time using a negative stiﬀness flexible mechanism. The test results show that the FSM achieves both a reduction in the first-order modal frequency and an increase in the second-order modal frequency. In addition, the use of negative stiﬀness leads to a decrease in stiﬀness in the working direction and an increase in working range. And a simple closed-loop control algorithm was used to conduct experiments on the designed FSM, achieving a closed-loop control bandwidth of 213.1 Hz. In summary, this design approach achieves frequency decoupling of flexible mechanisms for the first time and oﬀers a novel method to enhance the performance of equipment utilizing flexible mechanisms.

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来源期刊

Sensors and Actuators A-physical 工程技术-工程：电子与电气

CiteScore

8.10

自引率

6.50%

发文量

630

审稿时长

49 days

期刊介绍： Sensors and Actuators A: Physical brings together multidisciplinary interests in one journal entirely devoted to disseminating information on all aspects of research and development of solid-state devices for transducing physical signals. Sensors and Actuators A: Physical regularly publishes original papers, letters to the Editors and from time to time invited review articles within the following device areas: • Fundamentals and Physics, such as: classification of effects, physical effects, measurement theory, modelling of sensors, measurement standards, measurement errors, units and constants, time and frequency measurement. Modeling papers should bring new modeling techniques to the field and be supported by experimental results. • Materials and their Processing, such as: piezoelectric materials, polymers, metal oxides, III-V and II-VI semiconductors, thick and thin films, optical glass fibres, amorphous, polycrystalline and monocrystalline silicon. • Optoelectronic sensors, such as: photovoltaic diodes, photoconductors, photodiodes, phototransistors, positron-sensitive photodetectors, optoisolators, photodiode arrays, charge-coupled devices, light-emitting diodes, injection lasers and liquid-crystal displays. • Mechanical sensors, such as: metallic, thin-film and semiconductor strain gauges, diffused silicon pressure sensors, silicon accelerometers, solid-state displacement transducers, piezo junction devices, piezoelectric field-effect transducers (PiFETs), tunnel-diode strain sensors, surface acoustic wave devices, silicon micromechanical switches, solid-state flow meters and electronic flow controllers. Etc...