一种新型双弯曲悬架双量程MEMS电容式加速度计的设计与制造

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-06-09 DOI:10.1109/JSEN.2025.3575523

Reza Ahmadian Koochaksaraie;Farshad Barazandeh;Alireza Jabari;Mohammad Akbari

{"title":"一种新型双弯曲悬架双量程MEMS电容式加速度计的设计与制造","authors":"Reza Ahmadian Koochaksaraie;Farshad Barazandeh;Alireza Jabari;Mohammad Akbari","doi":"10.1109/JSEN.2025.3575523","DOIUrl":null,"url":null,"abstract":"This article presents the design, simulation, and fabrication of a novel dual-range microelectromechanical system (MEMS) capacitive accelerometer that utilizes a dual-flexural suspension system for enhanced dynamic performance. The device integrates two sensing modes—low-<italic>g and high-<italic>g—within a unified architecture to achieve both high sensitivity and wide dynamic range. Through systematic design optimization using COMSOL Multiphysics, the proposed accelerometer exhibits a high degree of linearity and stability across both operational ranges. Based on ultraviolet lithographie, galvanoformung, abformung (UV-LIGA) technology, the fabrication process is detailed alongside the results of the fabricated sensor’s structure. Experimental results demonstrate successful mode switching with a sensitivity of 0.9 and 0.2 mV/g for low-<italic>g and high-<italic>g modes, respectively, validating the viability of the dual-mode concept for advanced inertial sensing applications such as navigation and structural monitoring.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 14","pages":"26477-26484"},"PeriodicalIF":4.3000,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design and Fabrication of a Dual-Range MEMS Capacitive Accelerometer With a Novel Dual-Flexural Suspension System\",\"authors\":\"Reza Ahmadian Koochaksaraie;Farshad Barazandeh;Alireza Jabari;Mohammad Akbari\",\"doi\":\"10.1109/JSEN.2025.3575523\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This article presents the design, simulation, and fabrication of a novel dual-range microelectromechanical system (MEMS) capacitive accelerometer that utilizes a dual-flexural suspension system for enhanced dynamic performance. The device integrates two sensing modes—low-<italic>g and high-<italic>g—within a unified architecture to achieve both high sensitivity and wide dynamic range. Through systematic design optimization using COMSOL Multiphysics, the proposed accelerometer exhibits a high degree of linearity and stability across both operational ranges. Based on ultraviolet lithographie, galvanoformung, abformung (UV-LIGA) technology, the fabrication process is detailed alongside the results of the fabricated sensor’s structure. Experimental results demonstrate successful mode switching with a sensitivity of 0.9 and 0.2 mV/g for low-<italic>g and high-<italic>g modes, respectively, validating the viability of the dual-mode concept for advanced inertial sensing applications such as navigation and structural monitoring.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":\"25 14\",\"pages\":\"26477-26484\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2025-06-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11027725/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/11027725/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}

引用次数: 0

摘要

本文介绍了一种新型双量程微机电系统（MEMS）电容式加速度计的设计、仿真和制造，该加速度计利用双弯曲悬架系统来增强动态性能。该器件将低g和高g两种传感模式集成在一个统一的架构中，实现了高灵敏度和宽动态范围。通过使用COMSOL Multiphysics进行系统设计优化，所提出的加速度计在两个工作范围内都具有高度的线性和稳定性。基于UV-LIGA技术，详细介绍了传感器的制造过程，并给出了传感器的结构结果。实验结果表明，低g和高g模式的模式切换灵敏度分别为0.9和0.2 mV/g，验证了双模式概念在导航和结构监测等先进惯性传感应用中的可行性。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Design and Fabrication of a Dual-Range MEMS Capacitive Accelerometer With a Novel Dual-Flexural Suspension System

This article presents the design, simulation, and fabrication of a novel dual-range microelectromechanical system (MEMS) capacitive accelerometer that utilizes a dual-flexural suspension system for enhanced dynamic performance. The device integrates two sensing modes—low-g and high-g—within a unified architecture to achieve both high sensitivity and wide dynamic range. Through systematic design optimization using COMSOL Multiphysics, the proposed accelerometer exhibits a high degree of linearity and stability across both operational ranges. Based on ultraviolet lithographie, galvanoformung, abformung (UV-LIGA) technology, the fabrication process is detailed alongside the results of the fabricated sensor’s structure. Experimental results demonstrate successful mode switching with a sensitivity of 0.9 and 0.2 mV/g for low-g and high-g modes, respectively, validating the viability of the dual-mode concept for advanced inertial sensing applications such as navigation and structural monitoring.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice