在300毫米硅光子晶片上异质集成III-V/硅c波段可调谐激光器

IF 2.3 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Technology Letters Pub Date : 2025-06-23 DOI:10.1109/LPT.2025.3581932

Guan-Lin Su;Ranjeet Kumar;Duanni Huang;David Gold;Richard Jones;Haisheng Rong

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引用次数: 0

摘要

我们展示了在300毫米硅光子平台上制造的异质集成III-V/Si可调谐激光器，实现了从1510到1570 nm的宽调谐范围，侧模抑制比（SMSR）高于50 dB，洛伦兹线宽低于30 kHz，相对强度噪声小于- 150 dBc/Hz。该激光器在100毫安的偏置电流下提供超过20毫瓦的片上光功率，在晶圆上具有低可变性。采用闭环控制，激光频率稳定度保持在±1ghz以内。这种可调谐激光器可以很容易地与其他光子元件集成，如波长锁、调制器和探测器，使光通信、传感和下一代计算应用完全集成光子芯片。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Heterogeneously Integrated III-V/Silicon C-Band Tunable Lasers on 300-mm Silicon Photonic Wafers

We demonstrate a heterogeneously integrated III-V/Si tunable laser fabricated on a 300-mm silicon photonics platform, achieving a wide tuning range from 1510 to 1570 nm with a side-mode suppression ratio (SMSR) above 50 dB, a Lorentzian linewidth below 30 kHz, and relative intensity noise less than −150 dBc/Hz. This laser delivers on-chip optical power exceeding 20 mW at 100 mA of bias current with low variability across a wafer. With closed-loop control, the laser frequency stability is maintained within ±1 GHz. This tunable laser can be readily integrated with other photonic components, such as wavelength lockers, modulators, and detectors, enabling fully integrated photonic chips for optical communications, sensing, and next-generation computing applications.

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来源期刊

IEEE Photonics Technology Letters 工程技术-工程：电子与电气

CiteScore

5.00

自引率

3.80%

发文量

404

审稿时长

2.0 months

期刊介绍： IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.