{"title":"提高CMUT系统性能的PDMS声透镜的研制与性能评价","authors":"Fansheng Meng;Rihui Xue;Fei Wu;Chaoshuai Zhang;Xiangcheng Zeng;Guojun Zhang;Renxin Wang;Changde He;Yuhua Yang;Jiangong Cui;Wendong Zhang;Licheng Jia","doi":"10.1109/JSEN.2025.3573322","DOIUrl":null,"url":null,"abstract":"This article presents a comprehensive study on the design and fabrication of a convex acoustic lens for capacitive micromachined ultrasonic transducers (CMUTs) using polydimethylsiloxane (PDMS). The primary objective is to enhance ultrasound focusing capabilities, which is critical for improving the performance of CMUT-based systems. The proposed convex lens configuration was evaluated against lens less and flat matching layer (ML) configurations, demonstrating enhanced acoustic performance. The convex lens achieved a receiving sensitivity of −229.74 dB, a transmitting sensitivity of 164.43 dB, and a 36.5% bandwidth. In addition, it produced a narrower main lobe width of 7.49°, indicating improved directional control of the ultrasonic waves. These results highlight the significant advantages of using a convex PDMS lens to enhance ultrasonic transducer performance, particularly in terms of sensitivity and focusing precision. The optimized design holds great potential for a wide range of applications, including medical diagnostics, where accurate imaging and focused ultrasound are paramount, industrial inspection, which requires precise flaw detection, and environmental monitoring, where sensitive and accurate detection of sound waves is critical.","PeriodicalId":447,"journal":{"name":"IEEE Sensors Journal","volume":"25 14","pages":"27344-27352"},"PeriodicalIF":4.3000,"publicationDate":"2025-06-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Development and Performance Evaluation of PDMS Acoustic Lens for Enhanced Performance in CMUT Systems\",\"authors\":\"Fansheng Meng;Rihui Xue;Fei Wu;Chaoshuai Zhang;Xiangcheng Zeng;Guojun Zhang;Renxin Wang;Changde He;Yuhua Yang;Jiangong Cui;Wendong Zhang;Licheng Jia\",\"doi\":\"10.1109/JSEN.2025.3573322\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This article presents a comprehensive study on the design and fabrication of a convex acoustic lens for capacitive micromachined ultrasonic transducers (CMUTs) using polydimethylsiloxane (PDMS). The primary objective is to enhance ultrasound focusing capabilities, which is critical for improving the performance of CMUT-based systems. The proposed convex lens configuration was evaluated against lens less and flat matching layer (ML) configurations, demonstrating enhanced acoustic performance. The convex lens achieved a receiving sensitivity of −229.74 dB, a transmitting sensitivity of 164.43 dB, and a 36.5% bandwidth. In addition, it produced a narrower main lobe width of 7.49°, indicating improved directional control of the ultrasonic waves. These results highlight the significant advantages of using a convex PDMS lens to enhance ultrasonic transducer performance, particularly in terms of sensitivity and focusing precision. The optimized design holds great potential for a wide range of applications, including medical diagnostics, where accurate imaging and focused ultrasound are paramount, industrial inspection, which requires precise flaw detection, and environmental monitoring, where sensitive and accurate detection of sound waves is critical.\",\"PeriodicalId\":447,\"journal\":{\"name\":\"IEEE Sensors Journal\",\"volume\":\"25 14\",\"pages\":\"27344-27352\"},\"PeriodicalIF\":4.3000,\"publicationDate\":\"2025-06-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Sensors Journal\",\"FirstCategoryId\":\"103\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11027624/\",\"RegionNum\":2,\"RegionCategory\":\"综合性期刊\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Sensors Journal","FirstCategoryId":"103","ListUrlMain":"https://ieeexplore.ieee.org/document/11027624/","RegionNum":2,"RegionCategory":"综合性期刊","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Development and Performance Evaluation of PDMS Acoustic Lens for Enhanced Performance in CMUT Systems
This article presents a comprehensive study on the design and fabrication of a convex acoustic lens for capacitive micromachined ultrasonic transducers (CMUTs) using polydimethylsiloxane (PDMS). The primary objective is to enhance ultrasound focusing capabilities, which is critical for improving the performance of CMUT-based systems. The proposed convex lens configuration was evaluated against lens less and flat matching layer (ML) configurations, demonstrating enhanced acoustic performance. The convex lens achieved a receiving sensitivity of −229.74 dB, a transmitting sensitivity of 164.43 dB, and a 36.5% bandwidth. In addition, it produced a narrower main lobe width of 7.49°, indicating improved directional control of the ultrasonic waves. These results highlight the significant advantages of using a convex PDMS lens to enhance ultrasonic transducer performance, particularly in terms of sensitivity and focusing precision. The optimized design holds great potential for a wide range of applications, including medical diagnostics, where accurate imaging and focused ultrasound are paramount, industrial inspection, which requires precise flaw detection, and environmental monitoring, where sensitive and accurate detection of sound waves is critical.
期刊介绍:
The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following:
-Sensor Phenomenology, Modelling, and Evaluation
-Sensor Materials, Processing, and Fabrication
-Chemical and Gas Sensors
-Microfluidics and Biosensors
-Optical Sensors
-Physical Sensors: Temperature, Mechanical, Magnetic, and others
-Acoustic and Ultrasonic Sensors
-Sensor Packaging
-Sensor Networks
-Sensor Applications
-Sensor Systems: Signals, Processing, and Interfaces
-Actuators and Sensor Power Systems
-Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting
-Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data)
-Sensors in Industrial Practice