提高CMUT系统性能的PDMS声透镜的研制与性能评价

IF 4.3 2区 综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Fansheng Meng;Rihui Xue;Fei Wu;Chaoshuai Zhang;Xiangcheng Zeng;Guojun Zhang;Renxin Wang;Changde He;Yuhua Yang;Jiangong Cui;Wendong Zhang;Licheng Jia
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引用次数: 0

摘要

本文介绍了用聚二甲基硅氧烷(PDMS)设计和制造电容式微机械超声换能器(CMUTs)凸声透镜的综合研究。主要目标是增强超声聚焦能力,这对于提高基于cmut的系统的性能至关重要。提出的凸透镜配置对比无透镜和平面匹配层(ML)配置进行了评估,显示出增强的声学性能。该凸透镜的接收灵敏度为- 229.74 dB,发射灵敏度为164.43 dB,带宽为36.5%。此外,它产生了更窄的主瓣宽度为7.49°,表明超声波的方向控制得到了改善。这些结果突出了使用凸PDMS透镜来提高超声换能器性能的显着优势,特别是在灵敏度和聚焦精度方面。优化的设计在广泛的应用中具有巨大的潜力,包括医疗诊断,其中精确的成像和聚焦超声是至关重要的,工业检查,需要精确的缺陷检测,以及环境监测,其中灵敏和准确的声波检测至关重要。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development and Performance Evaluation of PDMS Acoustic Lens for Enhanced Performance in CMUT Systems
This article presents a comprehensive study on the design and fabrication of a convex acoustic lens for capacitive micromachined ultrasonic transducers (CMUTs) using polydimethylsiloxane (PDMS). The primary objective is to enhance ultrasound focusing capabilities, which is critical for improving the performance of CMUT-based systems. The proposed convex lens configuration was evaluated against lens less and flat matching layer (ML) configurations, demonstrating enhanced acoustic performance. The convex lens achieved a receiving sensitivity of −229.74 dB, a transmitting sensitivity of 164.43 dB, and a 36.5% bandwidth. In addition, it produced a narrower main lobe width of 7.49°, indicating improved directional control of the ultrasonic waves. These results highlight the significant advantages of using a convex PDMS lens to enhance ultrasonic transducer performance, particularly in terms of sensitivity and focusing precision. The optimized design holds great potential for a wide range of applications, including medical diagnostics, where accurate imaging and focused ultrasound are paramount, industrial inspection, which requires precise flaw detection, and environmental monitoring, where sensitive and accurate detection of sound waves is critical.
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来源期刊
IEEE Sensors Journal
IEEE Sensors Journal 工程技术-工程:电子与电气
CiteScore
7.70
自引率
14.00%
发文量
2058
审稿时长
5.2 months
期刊介绍: The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice
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