Yanyi Wang , Li Wang , Yong Chen , Zihan Yuan , Xuandong Liu
{"title":"硅针放电的静电消除特性研究","authors":"Yanyi Wang , Li Wang , Yong Chen , Zihan Yuan , Xuandong Liu","doi":"10.1016/j.elstat.2025.104117","DOIUrl":null,"url":null,"abstract":"<div><div>In the process of semiconductor production, charge accumulation can easily lead to electrostatic breakdown of the chip. With a silicon needle as the electrode, the DC high voltage electrostatic eliminator can achieve effective electrostatic control without metal impurities. Therefore, it has a broad application prospect. To investigate the efficacy and characteristics of electrostatic elimination using silicon needle electrodes, a test platform was established to evaluate their performance under the direct current conditions. The static decay time and balance voltage of the electrostatic elimination were determined as the characteristic indices. This study examined the influence of voltage amplitude, voltage polarity, operating distance and wind speed on the electrostatic elimination. The experimental results indicate that an increase in voltage accelerates the speed of electrostatic dissipation. A polarity effect was observed during the electrostatic elimination process of silicon needles. The static decay time under negative polarity is shorter than that under positive polarity. Furthermore, the balance voltage of negative polarity demonstrates superior performance compared to positive polarity. Additionally, the static decay time increases nonlinearly with the increase of the operating distance. In order to achieve high speed and balance in electrostatic elimination performance, it is recommended to add a specific direction of wind around the electrode, which also reduces the output requirements of the power supply.</div></div>","PeriodicalId":54842,"journal":{"name":"Journal of Electrostatics","volume":"136 ","pages":"Article 104117"},"PeriodicalIF":1.9000,"publicationDate":"2025-07-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Study on electrostatic elimination characteristics of silicon needle discharge\",\"authors\":\"Yanyi Wang , Li Wang , Yong Chen , Zihan Yuan , Xuandong Liu\",\"doi\":\"10.1016/j.elstat.2025.104117\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In the process of semiconductor production, charge accumulation can easily lead to electrostatic breakdown of the chip. With a silicon needle as the electrode, the DC high voltage electrostatic eliminator can achieve effective electrostatic control without metal impurities. Therefore, it has a broad application prospect. To investigate the efficacy and characteristics of electrostatic elimination using silicon needle electrodes, a test platform was established to evaluate their performance under the direct current conditions. The static decay time and balance voltage of the electrostatic elimination were determined as the characteristic indices. This study examined the influence of voltage amplitude, voltage polarity, operating distance and wind speed on the electrostatic elimination. The experimental results indicate that an increase in voltage accelerates the speed of electrostatic dissipation. A polarity effect was observed during the electrostatic elimination process of silicon needles. The static decay time under negative polarity is shorter than that under positive polarity. Furthermore, the balance voltage of negative polarity demonstrates superior performance compared to positive polarity. Additionally, the static decay time increases nonlinearly with the increase of the operating distance. In order to achieve high speed and balance in electrostatic elimination performance, it is recommended to add a specific direction of wind around the electrode, which also reduces the output requirements of the power supply.</div></div>\",\"PeriodicalId\":54842,\"journal\":{\"name\":\"Journal of Electrostatics\",\"volume\":\"136 \",\"pages\":\"Article 104117\"},\"PeriodicalIF\":1.9000,\"publicationDate\":\"2025-07-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Electrostatics\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0304388625000890\",\"RegionNum\":4,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Electrostatics","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0304388625000890","RegionNum":4,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Study on electrostatic elimination characteristics of silicon needle discharge
In the process of semiconductor production, charge accumulation can easily lead to electrostatic breakdown of the chip. With a silicon needle as the electrode, the DC high voltage electrostatic eliminator can achieve effective electrostatic control without metal impurities. Therefore, it has a broad application prospect. To investigate the efficacy and characteristics of electrostatic elimination using silicon needle electrodes, a test platform was established to evaluate their performance under the direct current conditions. The static decay time and balance voltage of the electrostatic elimination were determined as the characteristic indices. This study examined the influence of voltage amplitude, voltage polarity, operating distance and wind speed on the electrostatic elimination. The experimental results indicate that an increase in voltage accelerates the speed of electrostatic dissipation. A polarity effect was observed during the electrostatic elimination process of silicon needles. The static decay time under negative polarity is shorter than that under positive polarity. Furthermore, the balance voltage of negative polarity demonstrates superior performance compared to positive polarity. Additionally, the static decay time increases nonlinearly with the increase of the operating distance. In order to achieve high speed and balance in electrostatic elimination performance, it is recommended to add a specific direction of wind around the electrode, which also reduces the output requirements of the power supply.
期刊介绍:
The Journal of Electrostatics is the leading forum for publishing research findings that advance knowledge in the field of electrostatics. We invite submissions in the following areas:
Electrostatic charge separation processes.
Electrostatic manipulation of particles, droplets, and biological cells.
Electrostatically driven or controlled fluid flow.
Electrostatics in the gas phase.