256 × 2 InGaAsP/InP Geiger-Mode Avalanche Photodiode Arrays With a Triple-Stage Timing to Digital Converter

256 × 2 InGaAsP/InP Geiger-mode avalanche photodiode (GmAPD) arrays and a matched readout circuit with a triple-stage timing to digital converter (TDC) are realized. Pixels run asynchronously within the range gate of each frame, allowing measuring the time of flight of up to three reflected laser echoes. A mean array timing precision of 1 ns and a minimum hold-off time (T_hoff) of 64 ns are achieved. The measured mean dark count rates are 2.5, 1.0 and 0.5 kHz for the first, the second and the third stage TDC, respectively, under a mean photon detection efficiency (PDE) of 33.1% at 1064 nm, −20 °C and a T_hoff of 320 ns. While the cumulative afterpulsing probability (APP) exhibits strongly V_o- and T_hoff-dependent behaviors and a temperature-insensitive nature from −20 °C to 20 °C, a cumulative APP of 15% is obtained under a PDE of 20% and a T_hoff of 1 μs. Photon count rate measurements indicate trade-off between the photon blockage and the increased afterpulsing probability under shorter T_hoff. Furthermore, capabilities of parallel acquirement of three-dimensional laser point cloud and two-dimensional photon count images are also demonstrated, highlights the superiorities of this multi-TDC scheme in both active and passive imaging under strong background interference.