应用于纳米机电致动器的独立超纳米晶金刚石纳米结构的设计与制造

IF 4.3 3区材料科学 Q2 MATERIALS SCIENCE, COATINGS & FILMS

Diamond and Related Materials Pub Date : 2025-07-08 DOI:10.1016/j.diamond.2025.112617

Taro Ikeda, Yoshiaki Kanamori

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引用次数: 0

摘要

金刚石因其独特的材料特性和色心的存在，有望成为下一代半导体和量子器件平台的候选者。金刚石与微纳机电系统（MEMS/NEMS）的集成可以实现金刚石的更多功能应用，这在基于MEMS/NEMS的硅光子器件中得到了体现。在绝缘子上的金刚石晶片上设计并制备了用于纳米机电致动器的独立超纳米晶金刚石纳米结构。采用快速原子束刻蚀技术对金刚石纳米结构进行了精确刻蚀，并利用氢氟酸蒸汽对埋藏的氧化层进行了牺牲层刻蚀。实验结果表明，当驱动电压为200 V时，所制备的金刚石纳米结构的最大位移为1.28 μm，显示了可调谐金刚石光子器件的可能性。讨论了进一步改进金刚石纳米机电致动器，使其在可接受的驱动电压下增加位移，防止击穿。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

Design and fabrication of freestanding ultra-nanocrystalline diamond nanostructures applying to nano-electromechanical actuators

查看原文本刊更多论文

Design and fabrication of freestanding ultra-nanocrystalline diamond nanostructures applying to nano-electromechanical actuators

Diamond is expected to a candidate of next-generation semiconductor and a platform for quantum devices, owing to the extraordinary material properties and existence of color centers. An integration between diamond and micro- or nano-electromechanical systems (MEMS/NEMS) can realize more functional applications with diamond, which have shown in MEMS/NEMS-based silicon photonic devices. We designed and fabricated freestanding ultra-nanocrystalline diamond nanostructures applying to nano-electromechanical actuators on a diamond-on-insulator wafer. Diamond nanostructures were accurately patterned with employing the fast-atom-beam etching, and released by sacrificial layer etching of a buried oxide layer with using hydrofluoric acid vapor. We experimentally obtained maximum displacement of

1.28

μm with driving voltage of

200

V for the fabricated diamond nanostructure, which shows possibilities of tunable diamond photonic devices. We discuss about further improvement for diamond nano-electromechanical actuators to increasing displacement with acceptable driving voltage and prevent breaking down.

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来源期刊

Diamond and Related Materials 工程技术-材料科学：综合

CiteScore

6.00

自引率

14.60%

发文量

702

审稿时长

2.1 months

期刊介绍： DRM is a leading international journal that publishes new fundamental and applied research on all forms of diamond, the integration of diamond with other advanced materials and development of technologies exploiting diamond. The synthesis, characterization and processing of single crystal diamond, polycrystalline films, nanodiamond powders and heterostructures with other advanced materials are encouraged topics for technical and review articles. In addition to diamond, the journal publishes manuscripts on the synthesis, characterization and application of other related materials including diamond-like carbons, carbon nanotubes, graphene, and boron and carbon nitrides. Articles are sought on the chemical functionalization of diamond and related materials as well as their use in electrochemistry, energy storage and conversion, chemical and biological sensing, imaging, thermal management, photonic and quantum applications, electron emission and electronic devices. The International Conference on Diamond and Carbon Materials has evolved into the largest and most well attended forum in the field of diamond, providing a forum to showcase the latest results in the science and technology of diamond and other carbon materials such as carbon nanotubes, graphene, and diamond-like carbon. Run annually in association with Diamond and Related Materials the conference provides junior and established researchers the opportunity to exchange the latest results ranging from fundamental physical and chemical concepts to applied research focusing on the next generation carbon-based devices.