用于PET的0.11 μm CMOS工艺中大面积高PDE SiPM的实验研究

IF 4.6 Q1 RADIOLOGY, NUCLEAR MEDICINE & MEDICAL IMAGING
Jingbin Chen;Nicola D’Ascenzo;Daniele Passaretti;Hui Lao;Yuexuan Hua;Qingguo Xie
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引用次数: 0

摘要

采用标准互补金属氧化物半导体(CMOS)工艺制造的硅光电倍增管(SiPMs)使正电子发射断层扫描(PET)应用的成本效益高,可靠且节能的光敏传感器得以开发。然而,PET制造商在定制技术中更喜欢sipm,因为它们具有高光子探测效率(PDE)和低噪声,这是PET扫描仪能量和时间分辨率的关键参数。最近,RAYQUANT科技有限公司开发了一种高PDE SiPM,采用0.11- $\mu $ m CMOS工艺制造,面积为9 mm2。本文首次研究了SiPM收集LYSO晶体闪烁光用于PET应用的能力,评估了能量分辨率和符合时间分辨率(CTR)。LYSO/SiPM探测器的最佳能量分辨率(FWHM)为$\mathbf{(28)。$\mathbf {(10.6\pm 0.4)}$ %在511 keV, $\mathbf {(8.5\pm 0.4)}$ %在662 keV。当SiPM耦合到长度分别为20、10和5 mm的晶体时,最佳CTR (FWHM)分别为$\mathbf {(172\pm 2)}$ ps、$\mathbf {(147\pm 2)}$ ps和$\mathbf {(115\pm 1)}$ ps。这些结果证实了所研究的基于cmos的SiPM不仅适用于PET应用,而且甚至可以与定制技术制造的SiPM竞争。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Experimental Study of a Large Area High PDE SiPM in 0.11-μm CMOS Process for PET Applications
Silicon photomultipliers (SiPMs) fabricated in a standard complementary metal-oxide-semiconductor (CMOS) process enable the development of cost-effective, reliable, and power-efficient photosensors for positron emission tomography (PET) applications. However, PET manufacturers prefer SiPMs in customized technologies for their high photon detection efficiency (PDE) and low noise, which are crucial parameters for energy and time resolution in PET scanners. Recently, RAYQUANT Technology Ltd. has developed a high PDE SiPM fabricated in 0.11- $\mu $ m CMOS process, with large area of 9 mm2. This article investigates for the first time the ability of this SiPM to collect scintillation light from LYSO crystals for PET applications, evaluating energy resolution, and coincidence time resolution (CTR). The LYSO/SiPM detector achieves the best energy resolution (FWHM) of $\mathbf {(28. 0\pm 1.0)}$ % at 60 keV, $\mathbf {(10.6\pm 0.4)}$ % at 511 keV, and $\mathbf {(8.5\pm 0.4)}$ % at 662 keV. The best CTR (FWHM) is $\mathbf {(172\pm 2)}$ ps, $\mathbf {(147\pm 2)}$ ps, and $\mathbf {(115\pm 1)}$ ps, when the SiPM is coupled to crystals of 20, 10, and 5 mm length, respectively. These results confirm that the studied CMOS-based SiPM is not only suitable for PET applications but is even competitive with SiPMs fabricated in customized technologies.
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来源期刊
IEEE Transactions on Radiation and Plasma Medical Sciences
IEEE Transactions on Radiation and Plasma Medical Sciences RADIOLOGY, NUCLEAR MEDICINE & MEDICAL IMAGING-
CiteScore
8.00
自引率
18.20%
发文量
109
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