带亚波长光栅的vcsel模式优化与偏振控制

IF 2.1 4区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Journal Pub Date : 2025-06-10 DOI:10.1109/JPHOT.2025.3578660

Yongli Wang;Chuanchuan Li;Yang Zhang;Jian Li;Xin Wei

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引用次数: 0

摘要

我们演示了将亚波长光栅（SWG）集成到具有逆表面浮雕的795 nm垂直腔面发射激光器（VCSEL）中，以实现模式和偏振的协调控制。在0.5 μm左右的光栅周期和60 ~ 100 nm的刻蚀深度范围内，反射率高于91%。在不同模式之间引入高反射率差，有效抑制高阶模式，侧模抑制比（SMSR）为38 dB。SWG在横向电（TE）和横向磁（TM）分量上表现出不同的折射率，增加了各向异性，从而提高了正交极化抑制比（OPSR），达到26.7 dB。光栅参数的预先设计和宽松的制造公差可以促进用于量子传感系统的高性能vcsel的批量生产。

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Mode Optimization and Polarization Control in VCSELs with Sub-Wavelength Gratings

We have demonstrated the integration of sub-wavelength gratings (SWG) into a 795 nm vertical cavity surface emitting laser (VCSEL) with inverse surface relief to achieve coordinated control of the mode and polarization. At a grating period of around 0.5 μm and an etching depth range of 60 nm to 100 nm, the reflectivity was higher than 91%. A high reflectivity difference was introduced between different modes, effectively suppressing high-order modes with a side mode suppression ratio (SMSR) of 38 dB. The SWG exhibited different refractive indices for the transverse electric (TE) and transverse magnetic (TM) components, increasing anisotropy and thus enhancing the orthogonal polarization suppression ratio (OPSR) to 26.7 dB. The predesign and relaxed fabrication tolerances of grating parameters may facilitate the mass production of high-performance VCSELs for applications in quantum sensing systems.

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来源期刊

IEEE Photonics Journal ENGINEERING, ELECTRICAL & ELECTRONIC-OPTICS

CiteScore

4.50

自引率

8.30%

发文量

489

审稿时长

1.4 months

期刊介绍： Breakthroughs in the generation of light and in its control and utilization have given rise to the field of Photonics, a rapidly expanding area of science and technology with major technological and economic impact. Photonics integrates quantum electronics and optics to accelerate progress in the generation of novel photon sources and in their utilization in emerging applications at the micro and nano scales spanning from the far-infrared/THz to the x-ray region of the electromagnetic spectrum. IEEE Photonics Journal is an online-only journal dedicated to the rapid disclosure of top-quality peer-reviewed research at the forefront of all areas of photonics. Contributions addressing issues ranging from fundamental understanding to emerging technologies and applications are within the scope of the Journal. The Journal includes topics in: Photon sources from far infrared to X-rays, Photonics materials and engineered photonic structures, Integrated optics and optoelectronic, Ultrafast, attosecond, high field and short wavelength photonics, Biophotonics, including DNA photonics, Nanophotonics, Magnetophotonics, Fundamentals of light propagation and interaction; nonlinear effects, Optical data storage, Fiber optics and optical communications devices, systems, and technologies, Micro Opto Electro Mechanical Systems (MOEMS), Microwave photonics, Optical Sensors.