Siying Gao, Zhuoqun Wang, Ning Lu, Lei Xu, Zhanghua Han, Mohsen Rahmani, Yuechen Jia, Feng Chen
{"title":"用于高效紫外谐波产生的钽酸锂谐振超表面","authors":"Siying Gao, Zhuoqun Wang, Ning Lu, Lei Xu, Zhanghua Han, Mohsen Rahmani, Yuechen Jia, Feng Chen","doi":"10.1063/5.0258436","DOIUrl":null,"url":null,"abstract":"Lithium tantalate (LiTaO3, LT), structurally similar to lithium niobate, possesses a broad spectrum of optoelectronic properties that hold significant promise for integrated photonics applications. Due to its larger bandgap and higher optical damage threshold, LT can be employed for efficient nonlinear optical frequency conversion in the ultraviolet (UV) wavelength range. Here, we report on fabrication of monolithic, high-quality LT metasurfaces, composed of periodic arrays of LT truncated square pyramids, created by partially etching of a LT thin film layer using a focused ion beam milling process. These pyramidal structures introduce discrete translational symmetry, which allows for the folding of guided-mode dispersion into the first Brillouin zone, leading to the formation of guided mode resonances with Q-factors that can be easily controlled by the height of LT pyramids. The measurements show a Q-factor up to approximately 640 at 786 nm. By leveraging the strong field localization of these high-Q resonances, we demonstrate enhanced second-harmonic generation at 393 nm with an absolute conversion efficiency of 0.042%, establishing a new benchmark for the UV harmonic generation in dielectric metasurfaces. Moreover, our fabrication technique can be readily adapted to a wide range of other material platforms, opening new avenues for the development of high-quality UV metasurfaces and advanced nonlinear photonic meta-devices.","PeriodicalId":8200,"journal":{"name":"Applied physics reviews","volume":"51 1","pages":""},"PeriodicalIF":11.9000,"publicationDate":"2025-07-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Lithium tantalate resonant metasurfaces for highly efficient ultraviolet harmonic generation\",\"authors\":\"Siying Gao, Zhuoqun Wang, Ning Lu, Lei Xu, Zhanghua Han, Mohsen Rahmani, Yuechen Jia, Feng Chen\",\"doi\":\"10.1063/5.0258436\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Lithium tantalate (LiTaO3, LT), structurally similar to lithium niobate, possesses a broad spectrum of optoelectronic properties that hold significant promise for integrated photonics applications. Due to its larger bandgap and higher optical damage threshold, LT can be employed for efficient nonlinear optical frequency conversion in the ultraviolet (UV) wavelength range. Here, we report on fabrication of monolithic, high-quality LT metasurfaces, composed of periodic arrays of LT truncated square pyramids, created by partially etching of a LT thin film layer using a focused ion beam milling process. These pyramidal structures introduce discrete translational symmetry, which allows for the folding of guided-mode dispersion into the first Brillouin zone, leading to the formation of guided mode resonances with Q-factors that can be easily controlled by the height of LT pyramids. The measurements show a Q-factor up to approximately 640 at 786 nm. By leveraging the strong field localization of these high-Q resonances, we demonstrate enhanced second-harmonic generation at 393 nm with an absolute conversion efficiency of 0.042%, establishing a new benchmark for the UV harmonic generation in dielectric metasurfaces. Moreover, our fabrication technique can be readily adapted to a wide range of other material platforms, opening new avenues for the development of high-quality UV metasurfaces and advanced nonlinear photonic meta-devices.\",\"PeriodicalId\":8200,\"journal\":{\"name\":\"Applied physics reviews\",\"volume\":\"51 1\",\"pages\":\"\"},\"PeriodicalIF\":11.9000,\"publicationDate\":\"2025-07-08\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied physics reviews\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0258436\",\"RegionNum\":1,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied physics reviews","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/5.0258436","RegionNum":1,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}
Lithium tantalate resonant metasurfaces for highly efficient ultraviolet harmonic generation
Lithium tantalate (LiTaO3, LT), structurally similar to lithium niobate, possesses a broad spectrum of optoelectronic properties that hold significant promise for integrated photonics applications. Due to its larger bandgap and higher optical damage threshold, LT can be employed for efficient nonlinear optical frequency conversion in the ultraviolet (UV) wavelength range. Here, we report on fabrication of monolithic, high-quality LT metasurfaces, composed of periodic arrays of LT truncated square pyramids, created by partially etching of a LT thin film layer using a focused ion beam milling process. These pyramidal structures introduce discrete translational symmetry, which allows for the folding of guided-mode dispersion into the first Brillouin zone, leading to the formation of guided mode resonances with Q-factors that can be easily controlled by the height of LT pyramids. The measurements show a Q-factor up to approximately 640 at 786 nm. By leveraging the strong field localization of these high-Q resonances, we demonstrate enhanced second-harmonic generation at 393 nm with an absolute conversion efficiency of 0.042%, establishing a new benchmark for the UV harmonic generation in dielectric metasurfaces. Moreover, our fabrication technique can be readily adapted to a wide range of other material platforms, opening new avenues for the development of high-quality UV metasurfaces and advanced nonlinear photonic meta-devices.
期刊介绍:
Applied Physics Reviews (APR) is a journal featuring articles on critical topics in experimental or theoretical research in applied physics and applications of physics to other scientific and engineering branches. The publication includes two main types of articles:
Original Research: These articles report on high-quality, novel research studies that are of significant interest to the applied physics community.
Reviews: Review articles in APR can either be authoritative and comprehensive assessments of established areas of applied physics or short, timely reviews of recent advances in established fields or emerging areas of applied physics.