调整成分梯度溅射FeCoB薄膜中b梯度对微电感高频性能和电感的改善

IF 1.9 3区工程技术 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Transactions on Magnetics Pub Date : 2025-06-02 DOI:10.1109/TMAG.2025.3575406

Dalong Qiu;Xiaosong Wang;Shipeng Zhang;Wencai Lv;Shuguang Yi;Ming Liu;Yifei Zhang;Shandong Li

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引用次数: 0

摘要

研究了在Si（100）衬底上采用成分梯度溅射（CGS）法制备的50 nm厚铁钴硼（FeCoB）软磁薄膜的静态和动态磁性能随B成分梯度的变化规律。通过优化B成分梯度，产生较大的应力，导致单轴磁各向异性磁场${H} _{k}$从229.7增加到720.1 Oe，铁磁共振（FMR）频率从5.8增加到9.27 GHz。这是由于B掺杂消除了磁晶各向异性，由成分梯度引起的应力成为主要因素。然后将该薄膜作为磁芯集成到平面螺旋电感器中，导致电感增加24.6%，证明了该薄膜作为高频电子元件磁芯材料的潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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The Improvement of High-Frequency Performances and the Inductance of Micro-Inductors by Tuning the B-Gradient in Composition Gradient Sputtered FeCoB Thin Films

The static and dynamic magnetic properties of 50 nm thick iron-cobalt-boron (FeCoB) soft magnetic films, fabricated using a composition gradient sputtering (CGS) method on intrinsic Si (100) substrates, are studied as a function of the B composition gradient. By optimizing the B composition gradient, larger stress is induced, resulting in an increase of the uniaxial magnetic anisotropy field

${H} _{k}$

from 229.7 to 720.1 Oe and an increase in ferromagnetic resonance (FMR) frequency from 5.8 to 9.27 GHz. These are attributed to the B doping, which eliminated magneto-crystalline anisotropy, with the stress induced by the composition gradient becoming the dominant factor. The film was then integrated as a magnetic core into a planar spiral inductor, resulting in a 24.6% increase in inductance, demonstrating the potential of this film as a material for magnetic cores in high-frequency electronic components.

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来源期刊

IEEE Transactions on Magnetics 工程技术-工程：电子与电气

CiteScore

4.00

自引率

14.30%

发文量

565

审稿时长

4.1 months

期刊介绍： Science and technology related to the basic physics and engineering of magnetism, magnetic materials, applied magnetics, magnetic devices, and magnetic data storage. The IEEE Transactions on Magnetics publishes scholarly articles of archival value as well as tutorial expositions and critical reviews of classical subjects and topics of current interest.