Conformality limits of 2D WS2 on 3D nanostructures

3D nanostructures are a vital part of various applications envisaged for two-dimensional transition metal dichalcogenides (2D TMDs), such as nanoelectronics and catalysis. However, achieving conformal deposition of 2D TMD films on 3D nanostructures is challenging due to the requirement for bending the basal planes of the 2D TMDs. Here, the limits of conformality of 2D WS₂ deposited by atomic layer deposition on SiO₂ 3D nanostructures are investigated through cross-sectional transmission electron microscopy imaging. A minimum radius of curvature of 4 nm is identified above which basal plane conformality is almost always observed, while for smaller radii conformality is only observed in approximately half of the cases. We show that the observed tipping point agrees with the balance between the adhesion and stiffness forces, which allows for the estimation of the critical radius of curvature for other 2D TMDs and substrates. These results provide guidelines for the design of 3D nanostructured devices and substrates on which conformality of 2D materials is desired.