半导体工业中超高纯度316 L不锈钢的新型防腐策略：利用交流电压钝化和硝酸钝化

IF 7.4 1区材料科学 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY

Corrosion Science Pub Date : 2025-06-27 DOI:10.1016/j.corsci.2025.113153

Chaoran Ma , Zhice Yang , Peng Zhou , Yang Zhao , Yong Hua , Cheng Su , Tao Zhang , Fuhui Wang

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引用次数: 0

摘要

本研究提出了一种应用于半导体制造行业的超高纯度316 L不锈钢的新型防腐技术：利用交流电压钝化（AVP）和硝酸钝化（NP）。在AVP和NP的协同作用下，材料耐蚀性的显著增强可以通过两个途径实现：一是去除易腐蚀的弱点，包括氧化物夹杂物、表面缺陷和不紧密排列的晶体面；其次，优化钝化膜的性能，包括厚度、Cr含量和缺陷密度。利用自行研制的实验装置验证了复合钝化在半导体环境中的适用性。

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A novel anti-corrosion strategy for ultra-high purity 316 L stainless steel in the semiconductor industry: Leveraging alternating voltage passivation and nitric acid passivation

In this study, a novel anti-corrosion technique for the application of ultra-high purity 316 L stainless steel in semiconductor manufacturing industry was proposed: leveraging alternating voltage passivation (AVP) and nitric acid passivation (NP). Under the synergistic effect of AVP and NP, the substantial enhancement of corrosion resistance enables through two pathways: firstly, removing corrosion-susceptible weaknesses, including oxide inclusions, surface defects and non-close packed crystallographic planes; secondly, optimizing passive film properties, which manifest in thickness, Cr content, and defect density. The suitability of composite passivation in semiconductor environments was validated using a self-developed laboratory device.

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来源期刊

Corrosion Science 工程技术-材料科学：综合

CiteScore

13.60

自引率

18.10%

发文量

763

审稿时长

46 days

期刊介绍： Corrosion occurrence and its practical control encompass a vast array of scientific knowledge. Corrosion Science endeavors to serve as the conduit for the exchange of ideas, developments, and research across all facets of this field, encompassing both metallic and non-metallic corrosion. The scope of this international journal is broad and inclusive. Published papers span from highly theoretical inquiries to essentially practical applications, covering diverse areas such as high-temperature oxidation, passivity, anodic oxidation, biochemical corrosion, stress corrosion cracking, and corrosion control mechanisms and methodologies. This journal publishes original papers and critical reviews across the spectrum of pure and applied corrosion, material degradation, and surface science and engineering. It serves as a crucial link connecting metallurgists, materials scientists, and researchers investigating corrosion and degradation phenomena. Join us in advancing knowledge and understanding in the vital field of corrosion science.

半导体工业中超高纯度316 L不锈钢的新型防腐策略：利用交流电压钝化和硝酸钝化

摘要

半导体工业中超高纯度316 L不锈钢的新型防腐策略：利用交流电压钝化和硝酸钝化