利用反极化铌酸锂晶圆制备的超薄单片双晶片反射镜。

IF 3.9 2区 综合性期刊 Q1 MULTIDISCIPLINARY SCIENCES
Takato Inoue, Junya Yoshimizu, Toma Ueyama, Maaya Kano, Yoshiki Kohmura, Makina Yabashi, Satoshi Matsuyama
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引用次数: 0

摘要

可变形反射镜(dm)具有多种用途,近年来在x射线光学中得到广泛应用。DMs被用于各种可变参数的x射线光学系统中,其中压电双晶片反射镜最受青睐。然而,传统的双晶片反射镜具有有限的变形能力。在这项研究中,我们提出了一种新的单片双晶片反射镜,利用铌酸锂的极化反转特性。不像传统的双晶圆镜设计需要粘合多种材料,这种方法允许一个极薄的镜子,显着提高其变形能力。实验表明,镜面的曲率变化为0.1 m- 1。此外,在SPring-8中引入这种新型反射镜作为x射线聚焦光学器件后,它实现了目标椭圆形状的变形,峰谷高度为1 μm,精度为3 nm。这种精度和大变形量允许x射线束尺寸在200 nm到683 μm之间发生巨大变化。这种广泛的光束尺寸可变性为推进x射线分析和成像应用提供了巨大的潜力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Ultrathin monolithic bimorph mirror using polarization-inverted lithium niobate wafer.

Deformable mirrors (DMs) serve diverse applications and have been adopted in X-ray optics recently. DMs are being used in various X-ray optical systems with variable parameters, with piezoelectric bimorph mirrors favored the most. However, conventional bimorph mirrors have limited deformation capabilities. In this study, we propose a novel monolithic bimorph mirror that utilizes the polarization inversion properties of lithium niobate. Unlike traditional bimorph mirror designs that require bonding multiple materials, this approach allows for an extremely thin mirror that significantly enhances its deformation capabilities. Experimental fabrication of the mirror demonstrated a substantial curvature change of 0.1 m- 1. Furthermore, upon introduction of this novel mirror into SPring-8 as X-ray focusing optics, it achieved deformation to a target elliptical shape with a 1 μm peak-to-valley height and 3 nm precision. This accuracy and large deformation amount allowed for huge variation in the X-ray beam size from 200 nm to 683 μm. Such extensive beam size variability is offering significant potential for advancing X-ray analytical and imaging applications.

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来源期刊
Scientific Reports
Scientific Reports Natural Science Disciplines-
CiteScore
7.50
自引率
4.30%
发文量
19567
审稿时长
3.9 months
期刊介绍: We publish original research from all areas of the natural sciences, psychology, medicine and engineering. You can learn more about what we publish by browsing our specific scientific subject areas below or explore Scientific Reports by browsing all articles and collections. Scientific Reports has a 2-year impact factor: 4.380 (2021), and is the 6th most-cited journal in the world, with more than 540,000 citations in 2020 (Clarivate Analytics, 2021). •Engineering Engineering covers all aspects of engineering, technology, and applied science. It plays a crucial role in the development of technologies to address some of the world''s biggest challenges, helping to save lives and improve the way we live. •Physical sciences Physical sciences are those academic disciplines that aim to uncover the underlying laws of nature — often written in the language of mathematics. It is a collective term for areas of study including astronomy, chemistry, materials science and physics. •Earth and environmental sciences Earth and environmental sciences cover all aspects of Earth and planetary science and broadly encompass solid Earth processes, surface and atmospheric dynamics, Earth system history, climate and climate change, marine and freshwater systems, and ecology. It also considers the interactions between humans and these systems. •Biological sciences Biological sciences encompass all the divisions of natural sciences examining various aspects of vital processes. The concept includes anatomy, physiology, cell biology, biochemistry and biophysics, and covers all organisms from microorganisms, animals to plants. •Health sciences The health sciences study health, disease and healthcare. This field of study aims to develop knowledge, interventions and technology for use in healthcare to improve the treatment of patients.
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