Temperature-Enhanced Type Compensation Method for Large-Range Eddy Current Displacement Sensors

The eddy current displacement sensors (ECDSs) are widely used in precision industrial applications, but they are susceptible to temperature drift under varying temperature conditions, which limits their measurement accuracy. This study proposes a novel temperature compensation method aimed at improving the performance of (ECDS) across a broad temperature range. This method utilizes phase characteristics and dual ac bridge technology to effectively separate the temperature drift of the probe coil from the target displacement changes. In this way, the temperature stability of large-range ECDS is significantly enhanced, and drift caused by temperature changes in the probe coil is further eliminated through temperature calibration. Laboratory tests have shown that this method effectively reduces temperature-related displacement drift from 2093 to 132 ppm/°C within a temperature range of $20~^{\circ }$ C– $100~^{\circ }$ C. The results indicate that the proposed method significantly improves the measurement accuracy and reliability of ECDS in large temperature difference environments, providing important technical support for the precision measurement field.