基于新型SpacerX工艺的固态纳米孔阵列的晶圆级制造。

IF 7.3 1区 工程技术 Q1 INSTRUMENTS & INSTRUMENTATION
Lihuan Zhao, Jiajun Wang, Lin-Sheng Wu, Xin Zhao
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引用次数: 0

摘要

固态纳米孔(SSNPs)已经成为纳米技术和生物技术的变革平台,但由于缺乏成本效益高、可重复的制造技术,其应用受到限制。在这里,我们介绍了一种新的SpacerX工艺,该工艺受标准半导体制造工艺中使用的间隔图案的启发,用于晶圆级制造有序的纳米孔阵列。这项技术本质上是可扩展的,具有可调的纳米孔尺寸,即使在学术洁净室中,开孔率也超过99.9%。我们成功地展示了一种直径约30 nm,不均匀性低于10%,间距为10 μm的氮化硅(Si3N4)纳米孔阵列。通过进一步减小隔离剂的尺寸,纳米孔直径可以减小到10纳米。我们制作了多孔装置,并证明双孔装置对DNA分子具有更高的检测通量。SpacerX工艺只涉及两个紫外线光刻步骤和一个掩模,可以很容易地被商业代工厂采用,从而开启了以极低成本批量生产低于10纳米ssnp的可能性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process.

Solid-state nanopores (SSNPs) have emerged as a transformative platform in nanotechnology and biotechnology, yet their application is limited by the lack of cost-effective, reproducible fabrication technology. Here, we introduce a novel SpacerX process for wafer-scale fabrication of well-ordered nanopore arrays inspired by spacer patterning used in the standard semiconductor manufacturing process. This technique is intrinsically scalable and features tunable nanopore dimensions, with an open-pore rate exceeding 99.9%, even in an academic cleanroom. We successfully demonstrated a silicon nitride (Si3N4) nanopore array with a diameter of ~30 nm, non-uniformity below 10%, and spacing of 10 μm. By further reducing the spacer size, the nanopore diameter can be minimized to 10 nm. We fabricated multi-pore devices and showed that dual-pore devices offer higher detection throughput for DNA molecules. The SpacerX process only involves two ultraviolet lithography steps with one mask, and can be readily adopted by commercial foundries, thus opening the possibility of mass-producing sub-10 nm SSNPs at extremely low cost.

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来源期刊
Microsystems & Nanoengineering
Microsystems & Nanoengineering Materials Science-Materials Science (miscellaneous)
CiteScore
12.00
自引率
3.80%
发文量
123
审稿时长
20 weeks
期刊介绍: Microsystems & Nanoengineering is a comprehensive online journal that focuses on the field of Micro and Nano Electro Mechanical Systems (MEMS and NEMS). It provides a platform for researchers to share their original research findings and review articles in this area. The journal covers a wide range of topics, from fundamental research to practical applications. Published by Springer Nature, in collaboration with the Aerospace Information Research Institute, Chinese Academy of Sciences, and with the support of the State Key Laboratory of Transducer Technology, it is an esteemed publication in the field. As an open access journal, it offers free access to its content, allowing readers from around the world to benefit from the latest developments in MEMS and NEMS.
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