用于原位偏振中子反射测量的紧凑脉冲激光沉积系统

IF 3.8 2区材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY

Vacuum Pub Date : 2025-06-20 DOI:10.1016/j.vacuum.2025.114521

Grigorii Kirichuk , Alexey Grunin , Artur Dolgoborodov , Pavel Prokopovich , Petr Shvets , Alexey Vorobiev , Anton Devishvilli , Alexandr Goikhman , Ksenia Maksimova

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引用次数: 0

摘要

具有自旋轨道相互作用的铁磁体/重金属薄膜结构（如CoFeB/Mo）的发展需要先进的生产和研究方法。极化中子反射法（PNR）提供了对磁性演变的独特见解，特别是在生长过程中原位应用时。脉冲激光沉积（PLD）是一种生产磁性薄膜的通用方法，将PLD与原位PNR测量相结合为其研究提供了新的可能性。在这项工作中，我们开发了一个紧凑的真空室集成到中子仪器中，可以逐步沉积和原位PNR测量。培养出Mo/[CoFeB/Mo]12多层结构，每次循环后测量的中子反射率曲线显示了样品性质的逐渐演变。弱磁场响应表明CoFeB/Mo界面可能形成垂直磁各向异性（PMA）。此外，将单个CoFeB薄膜退火至450°C，然后沉积一层~ 5 Å Mo层。在0.01 T和0.75 T的磁场下，PNR测量结果显示PMA的面内磁化显著增加，证实了PMA的形成。因此，我们展示了PLD和原位PNR系统的首次成功运行，展示了其表征单层CoFeB和多层CoFeB/Mo薄膜结构的能力。

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Compact pulsed laser deposition system for in-situ polarized neutron reflectometry

The development of ferromagnet/heavy metal thin-film structures, such as CoFeB/Mo, with spin-orbit interaction requires advanced methods for their production and study. Polarized neutron reflectometry (PNR) provides unique insights into the evolution of magnetic properties, especially when applied in-situ during the growth process. Pulsed laser deposition (PLD) is a versatile method for producing magnetic thin films, and combining PLD with in-situ PNR measurements offers new possibilities for their investigation.

In this work, we developed a compact vacuum chamber integrated into the neutron instrument, enabling step-by-step deposition and in-situ PNR measurements. A multilayer Mo/[CoFeB/Mo]₁₂ structure was grown, and neutron reflectivity curves measured after each cycle revealed the gradual evolution of sample properties. A weak magnetic field response suggested the potential formation of perpendicular magnetic anisotropy (PMA) at CoFeB/Mo interfaces. Additionally, a single CoFeB film was annealed up to 450 °C, followed by the deposition of a ∼5 Å Mo layer. PNR measurements in magnetic fields of 0.01 T and 0.75 T showed a significant increase in in-plane magnetization, confirming PMA formation.

Thus, we demonstrate the first successful operation of a combined PLD and in-situ PNR system, showcasing its capabilities for characterizing single-layer CoFeB and multilayer CoFeB/Mo thin-film structures.

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来源期刊

Vacuum 工程技术-材料科学：综合

CiteScore

6.80

自引率

17.50%

发文量

审稿时长

34 days

期刊介绍： Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.