mxene基分子筛在提高半导体氢传感器选择性中的应用

IF 5.6 2区 工程技术 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC
Jingfeng Li;Zhenyu Yuan;Fangling Zhou;Huai Wang;Fanli Meng
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引用次数: 0

摘要

半导体电阻式气体传感器的气体选择性差,限制了其实际应用。由于半导体传感器器件与气体直接接触,在气体传输过程中对气体进行过滤,隔离干扰气体,防止传感器器件遇到干扰气体,是提高传感器选择性的有效方法。本文报道了一种用于半导体传感器滤波器的分子筛膜,它可以有效地隔离除氢以外的其他干扰气体,并且仍然保持对氢的高通量。该分子筛膜由二维材料MXene合成而成,具有较强的附着力和柔韧性,可与金属过滤器完美结合,大大提高了分子筛膜的实际应用价值。经过系统测试,发现配备分子筛的传感器相比未配备分子筛的传感器对甲烷、氨和一氧化碳的灵敏度降低了约90%,激发时仍保留了91%的对氢的灵敏度,这是由于分子筛膜在纳米级孔(0.35 nm)的分子筛膜上,选择性地隔离了除氢以外的大分子气体。这项工作为提高半导体型氢传感器的选择性提供了一种新的途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Application of MXene-Based Molecular Sieves in Improving Selectivity of Semiconductor Hydrogen Sensors
The poor gas selectivity of semiconductor resistive gas sensors has been limiting their practical applications. Since semiconductor sensor devices are in direct contact with gases, filtering the gases during gas transmission to isolate the interfering gases and prevent the sensor devices from meeting them is an effective method to improve the selectivity of the sensors. In this article, a molecular sieve film is reported for semiconductor sensor filters, which can substantially isolate other interfering gases except hydrogen and still retain a high throughput rate for hydrogen. The molecular sieve film is synthesized from the 2-D material MXene, which has strong adhesion and flexibility properties, and can be perfectly integrated with the metal filters, which greatly improves the value of the molecular sieve film for practical applications. After systematic testing, it is found that the sensor equipped with molecular sieve compared to no molecular sieve sensor for methane, ammonia, and carbon monoxide has about 90% reduction in sensitivity, exciting is still retained 91% of the sensitivity of hydrogen, which is due to the molecular sieve membrane in the nanoscale pores (0.35 nm) in the molecular sieve membrane, which selectively isolates large molecular gases other than hydrogen. This work provides a new approach to improve the selectivity of semiconductor-based hydrogen sensors.
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来源期刊
IEEE Transactions on Instrumentation and Measurement
IEEE Transactions on Instrumentation and Measurement 工程技术-工程:电子与电气
CiteScore
9.00
自引率
23.20%
发文量
1294
审稿时长
3.9 months
期刊介绍: Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.
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