{"title":"mxene基分子筛在提高半导体氢传感器选择性中的应用","authors":"Jingfeng Li;Zhenyu Yuan;Fangling Zhou;Huai Wang;Fanli Meng","doi":"10.1109/TIM.2025.3577854","DOIUrl":null,"url":null,"abstract":"The poor gas selectivity of semiconductor resistive gas sensors has been limiting their practical applications. Since semiconductor sensor devices are in direct contact with gases, filtering the gases during gas transmission to isolate the interfering gases and prevent the sensor devices from meeting them is an effective method to improve the selectivity of the sensors. In this article, a molecular sieve film is reported for semiconductor sensor filters, which can substantially isolate other interfering gases except hydrogen and still retain a high throughput rate for hydrogen. The molecular sieve film is synthesized from the 2-D material MXene, which has strong adhesion and flexibility properties, and can be perfectly integrated with the metal filters, which greatly improves the value of the molecular sieve film for practical applications. After systematic testing, it is found that the sensor equipped with molecular sieve compared to no molecular sieve sensor for methane, ammonia, and carbon monoxide has about 90% reduction in sensitivity, exciting is still retained 91% of the sensitivity of hydrogen, which is due to the molecular sieve membrane in the nanoscale pores (0.35 nm) in the molecular sieve membrane, which selectively isolates large molecular gases other than hydrogen. This work provides a new approach to improve the selectivity of semiconductor-based hydrogen sensors.","PeriodicalId":13341,"journal":{"name":"IEEE Transactions on Instrumentation and Measurement","volume":"74 ","pages":"1-10"},"PeriodicalIF":5.6000,"publicationDate":"2025-06-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Application of MXene-Based Molecular Sieves in Improving Selectivity of Semiconductor Hydrogen Sensors\",\"authors\":\"Jingfeng Li;Zhenyu Yuan;Fangling Zhou;Huai Wang;Fanli Meng\",\"doi\":\"10.1109/TIM.2025.3577854\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The poor gas selectivity of semiconductor resistive gas sensors has been limiting their practical applications. Since semiconductor sensor devices are in direct contact with gases, filtering the gases during gas transmission to isolate the interfering gases and prevent the sensor devices from meeting them is an effective method to improve the selectivity of the sensors. In this article, a molecular sieve film is reported for semiconductor sensor filters, which can substantially isolate other interfering gases except hydrogen and still retain a high throughput rate for hydrogen. The molecular sieve film is synthesized from the 2-D material MXene, which has strong adhesion and flexibility properties, and can be perfectly integrated with the metal filters, which greatly improves the value of the molecular sieve film for practical applications. After systematic testing, it is found that the sensor equipped with molecular sieve compared to no molecular sieve sensor for methane, ammonia, and carbon monoxide has about 90% reduction in sensitivity, exciting is still retained 91% of the sensitivity of hydrogen, which is due to the molecular sieve membrane in the nanoscale pores (0.35 nm) in the molecular sieve membrane, which selectively isolates large molecular gases other than hydrogen. This work provides a new approach to improve the selectivity of semiconductor-based hydrogen sensors.\",\"PeriodicalId\":13341,\"journal\":{\"name\":\"IEEE Transactions on Instrumentation and Measurement\",\"volume\":\"74 \",\"pages\":\"1-10\"},\"PeriodicalIF\":5.6000,\"publicationDate\":\"2025-06-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"IEEE Transactions on Instrumentation and Measurement\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://ieeexplore.ieee.org/document/11028111/\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q1\",\"JCRName\":\"ENGINEERING, ELECTRICAL & ELECTRONIC\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"IEEE Transactions on Instrumentation and Measurement","FirstCategoryId":"5","ListUrlMain":"https://ieeexplore.ieee.org/document/11028111/","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q1","JCRName":"ENGINEERING, ELECTRICAL & ELECTRONIC","Score":null,"Total":0}
Application of MXene-Based Molecular Sieves in Improving Selectivity of Semiconductor Hydrogen Sensors
The poor gas selectivity of semiconductor resistive gas sensors has been limiting their practical applications. Since semiconductor sensor devices are in direct contact with gases, filtering the gases during gas transmission to isolate the interfering gases and prevent the sensor devices from meeting them is an effective method to improve the selectivity of the sensors. In this article, a molecular sieve film is reported for semiconductor sensor filters, which can substantially isolate other interfering gases except hydrogen and still retain a high throughput rate for hydrogen. The molecular sieve film is synthesized from the 2-D material MXene, which has strong adhesion and flexibility properties, and can be perfectly integrated with the metal filters, which greatly improves the value of the molecular sieve film for practical applications. After systematic testing, it is found that the sensor equipped with molecular sieve compared to no molecular sieve sensor for methane, ammonia, and carbon monoxide has about 90% reduction in sensitivity, exciting is still retained 91% of the sensitivity of hydrogen, which is due to the molecular sieve membrane in the nanoscale pores (0.35 nm) in the molecular sieve membrane, which selectively isolates large molecular gases other than hydrogen. This work provides a new approach to improve the selectivity of semiconductor-based hydrogen sensors.
期刊介绍:
Papers are sought that address innovative solutions to the development and use of electrical and electronic instruments and equipment to measure, monitor and/or record physical phenomena for the purpose of advancing measurement science, methods, functionality and applications. The scope of these papers may encompass: (1) theory, methodology, and practice of measurement; (2) design, development and evaluation of instrumentation and measurement systems and components used in generating, acquiring, conditioning and processing signals; (3) analysis, representation, display, and preservation of the information obtained from a set of measurements; and (4) scientific and technical support to establishment and maintenance of technical standards in the field of Instrumentation and Measurement.