基于LiNbO3/SiC的高性能Love-mode声子晶体谐振器实现了352的FoM

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-06-17 DOI:10.1063/5.0274355

Yi-Han He, Zhen-Hui Qin, Hua-Yang Chen, Nan-Xin Yu, Zhi-Wen Wang, Si-Yuan Yu, Yan-Feng Chen

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引用次数: 0

摘要

本文报道了一种基于LiNbO3/SiC衬底的高性能Love-mode声子晶体谐振器（PnCR），该谐振器是用声子晶体（pnc）代替传统的Bragg反射器实现的。该方法显著增强了能量约束，实现了352.4的优异值（FoM），这是目前在薄膜表面声波（TF-SAW）器件中报道的最高值，同时机电耦合系数（kt2）为27.3%，在2.18 GHz时最大波德q （Qmax）为1291。此外，Qmax对pnc和数字间换能器间距的周期性依赖提供了有价值的设计指导。这些结果强调了pncr在推动下一代微波声学器件向更高性能和更小型化方向发展方面的变革潜力。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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High-performance Love-mode phononic crystal resonators on LiNbO3/SiC achieving an FoM of 352

This Letter reports a high-performance Love-mode phononic crystal resonator (PnCR) on a LiNbO3/SiC substrate, realized by substituting conventional Bragg reflectors with phononic crystals (PnCs). This approach significantly enhances energy confinement, achieving a record figure of merit (FoM) of 352.4, currently the highest reported in thin-film surface acoustic wave (TF-SAW) devices, along with an electromechanical coupling coefficient (kt2) of 27.3% and a maximum Bode-Q (Qmax) of 1291 at 2.18 GHz. Additionally, a periodic dependence of Qmax on the spacing between PnCs and the interdigital transducers provides a valuable design guideline. These results underscore the transformative potential of PnCRs in advancing next-generation microwave acoustic devices toward higher performance and greater miniaturization.

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来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.