分辨率可切换的硅基片上光谱仪

IF 6.7 1区 物理与天体物理 Q1 MATERIALS SCIENCE, MULTIDISCIPLINARY
Long Zhang, Zhituo Chen, Gaopeng Wang, Dajian Liu, Penghui Dong, Da Lv, Haorui Liu, Yiwei Xie, Yaocheng Shi and Daoxin Dai*, 
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引用次数: 0

摘要

我们展示了通过集成多模波导光栅(MWGs)和热可调谐光子晶体纳米束腔(PCNCs)实现的第一个可切换分辨率的片上硅光子光谱仪。利用级联的宽带通MWG,目标频谱被划分为多个独立的子带,实现了宽的工作带宽和可根据需要定制的频谱范围。PCNCs为每个子带提供精确的滤波,并便于分辨率切换,以有效地平衡光谱分辨率和检测速度。在这项工作中,展示了一个具有可切换分辨率的10通道光谱仪,该光谱仪采用标准的多项目晶圆(MPW)铸造工艺制造,占地面积为0.36 mm2。在1480-1567 nm的光谱范围内工作,光谱仪提供0.04 nm的高分辨率模式以提高精度,0.12 nm的低分辨率模式以加速检测。通过对不同分辨率下氰化氢气体的光谱分析,进一步验证了该设计的有效性。这种创新的架构标志着自适应光谱测量的重大进步,展示了各种应用的巨大潜力,包括大规模气体监测,多样品药物分析和其他精度要求高的领域。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Resolution-Switchable Silicon-Based On-Chip Spectrometer

Resolution-Switchable Silicon-Based On-Chip Spectrometer

We demonstrate the first resolution-switchable on-chip silicon photonic spectrometer achieved through the integration of multimode waveguide gratings (MWGs) and thermally tunable photonic crystal nanobeam cavities (PCNCs). Leveraging a cascaded wide-bandpass MWG, the target spectrum is partitioned into multiple independent sub-bands, enabling a broad operational bandwidth and customizable spectral ranges as required. The PCNCs provide precise filtering for each sub-band and facilitate resolution switching to balance spectral resolution and detection speed efficiently. In this work, a 10-channel spectrometer with switchable resolution is demonstrated, which is fabricated using a standard Multi-Project Wafer (MPW) foundry process with a compact footprint of 0.36 mm2. Operating over a spectral range of 1480–1567 nm, the spectrometer offers a high-resolution mode of 0.04 nm for enhanced precision and a low-resolution mode of 0.12 nm for accelerated detection. The effectiveness of this design is further validated through the spectral analysis of Hydrogen Cyanide gas under varying resolutions. This innovative architecture marks a significant advancement in adaptive spectral measurement, showcasing immense potential for diverse applications, including large-scale gas monitoring, multisample pharmaceutical analysis, and other precision-demanding fields.

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来源期刊
ACS Photonics
ACS Photonics NANOSCIENCE & NANOTECHNOLOGY-MATERIALS SCIENCE, MULTIDISCIPLINARY
CiteScore
11.90
自引率
5.70%
发文量
438
审稿时长
2.3 months
期刊介绍: Published as soon as accepted and summarized in monthly issues, ACS Photonics will publish Research Articles, Letters, Perspectives, and Reviews, to encompass the full scope of published research in this field.
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