新型绿色化学机械抛光制备的镍合金原子表面

IF 6.1 1区工程技术 Q1 ENGINEERING, MECHANICAL

Tribology International Pub Date : 2025-06-14 DOI:10.1016/j.triboint.2025.110902

Liguang Dong , Zhenyu Zhang , Feng Zhao , Qiyuan Li , Hongxiu Zhou , Xiaofei Yang , Xiuqing Liu , Junde Guo , Xuan Zheng

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引用次数: 0

摘要

使用绿色抛光镍合金的表面粗糙度要小于0.5 nm，这是一个挑战。为了解决这一挑战，开发了一种新型的绿色化学机械抛光（CMP），它含有二氧化硅、柠檬酸和过氧化氢。经过CMP处理后，GH3536 Ni合金在测量面积为50 × 50 μm2处的表面粗糙度达到0.215 nm，材料去除率（MRR）为43.8 nm/min。通过分子动力学（MD）模拟，阐明了纳米划痕抛光机理。MD模拟结果表明，磨料在Ni合金和抛光垫之间的滚动作用主导了抛光过程。与纳米划伤相比，二氧化硅磨料在轧制过程中致密化可以减轻压应力。

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Atomic surface on a Ni alloy produced by novel green chemical mechanical polishing

It poses a challenge to garner surface roughness less than 0.5 nm using a green polishing for a Ni alloy. To solve this challenge, a novel green chemical mechanical polishing (CMP) was developed, containing silica, citric acid and hydrogen peroxide. After CMP, surface roughness of 0.215 nm was achieved on a Ni alloy of GH3536 at a measurement area of 50 × 50 μm², and the material removal rate (MRR) is 43.8 nm/min. Polishing mechanism is elucidated by nanoscratching through molecular dynamics (MD) simulations. MD simulations reveal that rolling of abrasives between the Ni alloy and polishing pad dominates the polishing process. Densification of silica abrasives during rolling could alleviate the compressive stress compared with that in nanoscratching.'

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来源期刊

Tribology International 工程技术-工程：机械

CiteScore

10.10

自引率

16.10%

发文量

627

审稿时长

35 days

期刊介绍： Tribology is the science of rubbing surfaces and contributes to every facet of our everyday life, from live cell friction to engine lubrication and seismology. As such tribology is truly multidisciplinary and this extraordinary breadth of scientific interest is reflected in the scope of Tribology International. Tribology International seeks to publish original research papers of the highest scientific quality to provide an archival resource for scientists from all backgrounds. Written contributions are invited reporting experimental and modelling studies both in established areas of tribology and emerging fields. Scientific topics include the physics or chemistry of tribo-surfaces, bio-tribology, surface engineering and materials, contact mechanics, nano-tribology, lubricants and hydrodynamic lubrication.