双辅助阳极协同作用,通过内置圆柱形阴极弧离子镀在细长管内壁上沉积CrNx涂层

IF 3.8 2区 材料科学 Q2 MATERIALS SCIENCE, MULTIDISCIPLINARY
Benfu Wang , Huiyuan Geng , Xiubo Tian , Chunzhi Gong , Tianshi Hu , Hao Zhu , Jin Zhang , Yong Lian
{"title":"双辅助阳极协同作用,通过内置圆柱形阴极弧离子镀在细长管内壁上沉积CrNx涂层","authors":"Benfu Wang ,&nbsp;Huiyuan Geng ,&nbsp;Xiubo Tian ,&nbsp;Chunzhi Gong ,&nbsp;Tianshi Hu ,&nbsp;Hao Zhu ,&nbsp;Jin Zhang ,&nbsp;Yong Lian","doi":"10.1016/j.vacuum.2025.114505","DOIUrl":null,"url":null,"abstract":"<div><div>Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr<sub>2</sub>N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10<sup>−6</sup> mm<sup>3</sup>/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114505"},"PeriodicalIF":3.8000,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Double auxiliary anodes collaborate to deposit CrNx coatings on the inner wall of slender tube by built-in cylindrical cathodic-arc ion plating\",\"authors\":\"Benfu Wang ,&nbsp;Huiyuan Geng ,&nbsp;Xiubo Tian ,&nbsp;Chunzhi Gong ,&nbsp;Tianshi Hu ,&nbsp;Hao Zhu ,&nbsp;Jin Zhang ,&nbsp;Yong Lian\",\"doi\":\"10.1016/j.vacuum.2025.114505\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr<sub>2</sub>N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10<sup>−6</sup> mm<sup>3</sup>/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"240 \",\"pages\":\"Article 114505\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2025-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25004956\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25004956","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
引用次数: 0

摘要

氮化铬(CrNx)涂层表现出卓越的机械和摩擦学性能,使其成为苛刻工业环境中防护应用的理想选择。然而,由于狭窄的空间和精确相位控制的困难,在细长管的内表面均匀沉积CrNx涂层仍然具有挑战性。在这里,我们介绍了一种利用双辅助阳极和内置圆柱形阴极弧离子镀的新方法,成功地在直径40 mm,长度120 mm的管内沉积CrNx涂层。对氮气流速的系统研究揭示了意想不到的相变,从混合CrN + Cr2N相转变为单一CrN相,然后在更高流速下恢复为混合相。在40 sccm下制备的涂层具有最佳的力学性能,硬度最高(17.4 GPa),而在80 sccm下制备的纯CrN相涂层的磨损率最低(2.95 × 10−6 mm3/(N·m))。我们的研究结果表明,使用这种创新技术可以在细长管中始终如一地实现稳定沉积和精确的相位控制。这一进步解决了传统方法无法解决的关键稳定性和均匀性挑战,提高了涂层性能,扩大了各种工业应用的保护涂层能力。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Double auxiliary anodes collaborate to deposit CrNx coatings on the inner wall of slender tube by built-in cylindrical cathodic-arc ion plating
Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr2N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10−6 mm3/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.
求助全文
通过发布文献求助,成功后即可免费获取论文全文。 去求助
来源期刊
Vacuum
Vacuum 工程技术-材料科学:综合
CiteScore
6.80
自引率
17.50%
发文量
0
审稿时长
34 days
期刊介绍: Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences. A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below. The scope of the journal includes: 1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes). 2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis. 3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification. 4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
确定
请完成安全验证×
copy
已复制链接
快去分享给好友吧!
我知道了
右上角分享
点击右上角分享
0
联系我们:info@booksci.cn Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。 Copyright © 2023 布克学术 All rights reserved.
京ICP备2023020795号-1
ghs 京公网安备 11010802042870号
Book学术文献互助
Book学术文献互助群
群 号:604180095
Book学术官方微信