Benfu Wang , Huiyuan Geng , Xiubo Tian , Chunzhi Gong , Tianshi Hu , Hao Zhu , Jin Zhang , Yong Lian
{"title":"双辅助阳极协同作用,通过内置圆柱形阴极弧离子镀在细长管内壁上沉积CrNx涂层","authors":"Benfu Wang , Huiyuan Geng , Xiubo Tian , Chunzhi Gong , Tianshi Hu , Hao Zhu , Jin Zhang , Yong Lian","doi":"10.1016/j.vacuum.2025.114505","DOIUrl":null,"url":null,"abstract":"<div><div>Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr<sub>2</sub>N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10<sup>−6</sup> mm<sup>3</sup>/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.</div></div>","PeriodicalId":23559,"journal":{"name":"Vacuum","volume":"240 ","pages":"Article 114505"},"PeriodicalIF":3.8000,"publicationDate":"2025-06-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Double auxiliary anodes collaborate to deposit CrNx coatings on the inner wall of slender tube by built-in cylindrical cathodic-arc ion plating\",\"authors\":\"Benfu Wang , Huiyuan Geng , Xiubo Tian , Chunzhi Gong , Tianshi Hu , Hao Zhu , Jin Zhang , Yong Lian\",\"doi\":\"10.1016/j.vacuum.2025.114505\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr<sub>2</sub>N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10<sup>−6</sup> mm<sup>3</sup>/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.</div></div>\",\"PeriodicalId\":23559,\"journal\":{\"name\":\"Vacuum\",\"volume\":\"240 \",\"pages\":\"Article 114505\"},\"PeriodicalIF\":3.8000,\"publicationDate\":\"2025-06-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Vacuum\",\"FirstCategoryId\":\"88\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0042207X25004956\",\"RegionNum\":2,\"RegionCategory\":\"材料科学\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"MATERIALS SCIENCE, MULTIDISCIPLINARY\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Vacuum","FirstCategoryId":"88","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0042207X25004956","RegionNum":2,"RegionCategory":"材料科学","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"MATERIALS SCIENCE, MULTIDISCIPLINARY","Score":null,"Total":0}
Double auxiliary anodes collaborate to deposit CrNx coatings on the inner wall of slender tube by built-in cylindrical cathodic-arc ion plating
Chromium nitride (CrNx) coatings demonstrate exceptional mechanical and tribological properties, making them ideal for protective applications in demanding industrial environments. However, uniform deposition of CrNx coatings on inner surfaces of slender tubes remains challenging due to confined spaces and difficulties in precise phase control. Here, we introduce a novel approach utilizing a double auxiliary anode and built-in cylindrical cathodic-arc ion plating to successfully deposit CrNx coatings inside tubes (40 mm diameter, 120 mm length). Systematic investigation of nitrogen flow rates revealed unexpected phase transformations, transitioning from mixed CrN + Cr2N phases to single CrN phase, then reverting to mixed phases at higher flow rates. Coatings produced at 40 sccm exhibited optimal mechanical properties with maximum hardness (17.4 GPa), while minimum wear rate (2.95 × 10−6 mm3/(N·m)) was achieved at 80 sccm with pure CrN phase. Our findings demonstrate that stable deposition and precise phase control can be consistently achieved in slender tubes using this innovative technique. This advancement addresses critical stability and uniformity challenges unresolved by conventional methods, enhancing coating performance and expanding protective coating capabilities for diverse industrial applications.
期刊介绍:
Vacuum is an international rapid publications journal with a focus on short communication. All papers are peer-reviewed, with the review process for short communication geared towards very fast turnaround times. The journal also published full research papers, thematic issues and selected papers from leading conferences.
A report in Vacuum should represent a major advance in an area that involves a controlled environment at pressures of one atmosphere or below.
The scope of the journal includes:
1. Vacuum; original developments in vacuum pumping and instrumentation, vacuum measurement, vacuum gas dynamics, gas-surface interactions, surface treatment for UHV applications and low outgassing, vacuum melting, sintering, and vacuum metrology. Technology and solutions for large-scale facilities (e.g., particle accelerators and fusion devices). New instrumentation ( e.g., detectors and electron microscopes).
2. Plasma science; advances in PVD, CVD, plasma-assisted CVD, ion sources, deposition processes and analysis.
3. Surface science; surface engineering, surface chemistry, surface analysis, crystal growth, ion-surface interactions and etching, nanometer-scale processing, surface modification.
4. Materials science; novel functional or structural materials. Metals, ceramics, and polymers. Experiments, simulations, and modelling for understanding structure-property relationships. Thin films and coatings. Nanostructures and ion implantation.