基于形态学方法的不连续表面干涉测量

IF 3.7 2区工程技术 Q2 OPTICS

Optics and Lasers in Engineering Pub Date : 2025-06-11 DOI:10.1016/j.optlaseng.2025.109131

Shuai Wang , Bosong Duan , Bingfeng Ju , Wule Zhu

{"title":"基于形态学方法的不连续表面干涉测量","authors":"Shuai Wang , Bosong Duan , Bingfeng Ju , Wule Zhu","doi":"10.1016/j.optlaseng.2025.109131","DOIUrl":null,"url":null,"abstract":"<div><div>In measurement scenarios such as interferometry, reliable phase unwrapping plays an essential role in ensuring accurate performance. With the increasing demand for non-continuous surface measurements, the need for measurement of discontinuous surfaces is becoming increasingly important. However, for existing phase unwrapping algorithms, it remains quite challenging to unwrap discontinuous phases both accurately and efficiently. To conquer these challenges, we propose a new algorithm based on mathematical morphology and managed to unwrap discontinuous phase map. With adequate mask design, a discontinuous form measurement was successfully achieved with numerical deviation of 1/19λ in PV and 1/40λ (λ=632.8nm) in RMS compared to equipment-measured benchmark.</div></div>","PeriodicalId":49719,"journal":{"name":"Optics and Lasers in Engineering","volume":"194 ","pages":"Article 109131"},"PeriodicalIF":3.7000,"publicationDate":"2025-06-11","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Interferometric measurement of discontinuous surfaces based on morphology method\",\"authors\":\"Shuai Wang , Bosong Duan , Bingfeng Ju , Wule Zhu\",\"doi\":\"10.1016/j.optlaseng.2025.109131\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>In measurement scenarios such as interferometry, reliable phase unwrapping plays an essential role in ensuring accurate performance. With the increasing demand for non-continuous surface measurements, the need for measurement of discontinuous surfaces is becoming increasingly important. However, for existing phase unwrapping algorithms, it remains quite challenging to unwrap discontinuous phases both accurately and efficiently. To conquer these challenges, we propose a new algorithm based on mathematical morphology and managed to unwrap discontinuous phase map. With adequate mask design, a discontinuous form measurement was successfully achieved with numerical deviation of 1/19λ in PV and 1/40λ (λ=632.8nm) in RMS compared to equipment-measured benchmark.</div></div>\",\"PeriodicalId\":49719,\"journal\":{\"name\":\"Optics and Lasers in Engineering\",\"volume\":\"194 \",\"pages\":\"Article 109131\"},\"PeriodicalIF\":3.7000,\"publicationDate\":\"2025-06-11\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics and Lasers in Engineering\",\"FirstCategoryId\":\"5\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0143816625003161\",\"RegionNum\":2,\"RegionCategory\":\"工程技术\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics and Lasers in Engineering","FirstCategoryId":"5","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0143816625003161","RegionNum":2,"RegionCategory":"工程技术","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

摘要

在干涉测量等测量场景中，可靠的相位展开对于确保准确的性能起着至关重要的作用。随着非连续曲面测量需求的增加，对非连续曲面的测量需求变得越来越重要。然而，对于现有的相位展开算法来说，如何准确有效地展开不连续相位仍然是一个很大的挑战。为了克服这些挑战，我们提出了一种基于数学形态学的新算法，并成功地展开了不连续相位图。通过适当的掩模设计，与设备测量基准相比，成功实现了不连续形状测量，PV和RMS的数值偏差分别为1/19λ和1/40λ (λ=632.8nm)。

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Interferometric measurement of discontinuous surfaces based on morphology method

In measurement scenarios such as interferometry, reliable phase unwrapping plays an essential role in ensuring accurate performance. With the increasing demand for non-continuous surface measurements, the need for measurement of discontinuous surfaces is becoming increasingly important. However, for existing phase unwrapping algorithms, it remains quite challenging to unwrap discontinuous phases both accurately and efficiently. To conquer these challenges, we propose a new algorithm based on mathematical morphology and managed to unwrap discontinuous phase map. With adequate mask design, a discontinuous form measurement was successfully achieved with numerical deviation of 1/19λ in PV and 1/40λ (λ=632.8nm) in RMS compared to equipment-measured benchmark.

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来源期刊

Optics and Lasers in Engineering 工程技术-光学

CiteScore

8.90

自引率

8.70%

发文量

384

审稿时长

42 days

期刊介绍： Optics and Lasers in Engineering aims at providing an international forum for the interchange of information on the development of optical techniques and laser technology in engineering. Emphasis is placed on contributions targeted at the practical use of methods and devices, the development and enhancement of solutions and new theoretical concepts for experimental methods. Optics and Lasers in Engineering reflects the main areas in which optical methods are being used and developed for an engineering environment. Manuscripts should offer clear evidence of novelty and significance. Papers focusing on parameter optimization or computational issues are not suitable. Similarly, papers focussed on an application rather than the optical method fall outside the journal''s scope. The scope of the journal is defined to include the following: -Optical Metrology- Optical Methods for 3D visualization and virtual engineering- Optical Techniques for Microsystems- Imaging, Microscopy and Adaptive Optics- Computational Imaging- Laser methods in manufacturing- Integrated optical and photonic sensors- Optics and Photonics in Life Science- Hyperspectral and spectroscopic methods- Infrared and Terahertz techniques