{"title":"太赫兹混频器用高截止频率GaN SBD的设计","authors":"Siyuan Zhang , Xiaolin Hao , Guodong Gu , Hao Yu , Xubo Song , Yuanjie Lv , Wei Huang , D.W. Zhang , Junyan Zhu , Yanwen Zhang , Xiaodong Yang , Zhihong Feng","doi":"10.1016/j.micrna.2025.208234","DOIUrl":null,"url":null,"abstract":"<div><div>This work firstly reports the high-frequency GaN planar Schottky barrier diodes (SBDs) for 220 GHz mixer applications, while conducting a systematic investigation into the design and optimization of device frequency performance through advanced device-level simulations. To enhance the cutoff frequency characteristics, device-level Sentaurus-TCAD simulation were employed to establish the quantitative relationship between critical structural parameters (N-GaN layer thickness and anode size) and key electrical parameters (series resistance <em>R</em><sub>s</sub> and zero-bias junction capacitance <em>C</em><sub>j0</sub>). Results reveal that the reduction of the N-GaN layer thickness combined with optimal anode size enables significant improvement in cutoff frequency, achieving theoretical values nearly 4 THz. Guided by these simulations, the device fabricated within current fabrication capabilities achieved a 31.55 Ω <em>R</em> and 2.1 fF <em>C</em><sub>j0</sub> with a 50 nm N-GaN layer thickness and a 0.5 μm anode radius, producing a high cutoff frequency of 2.41 THz. Finally, the SBD fabricated based on simulation was embedded in a quartz based microstrip circuit for testing. The mixer exhibits good millimeter-wave performance with a conversion loss (CL) below 18 dB across 210–224 GHz and an input 1 dB compression point (<em>P</em><sub>in1dB</sub>) of 2 dBm at room temperature, confirming excellent linearity characteristics. This work establishes following advancements, including the development of a TCAD-based simulation framework for optimizing parasitic parameters and cutoff frequency in GaN SBDs, and the demonstration of high-frequency GaN SBDs’ potential in terahertz mixer systems, providing a novel methodology for advancing GaN technology in terahertz applications.</div></div>","PeriodicalId":100923,"journal":{"name":"Micro and Nanostructures","volume":"206 ","pages":"Article 208234"},"PeriodicalIF":3.0000,"publicationDate":"2025-06-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Design of GaN SBD with high cutoff frequency for THz mixer applications\",\"authors\":\"Siyuan Zhang , Xiaolin Hao , Guodong Gu , Hao Yu , Xubo Song , Yuanjie Lv , Wei Huang , D.W. Zhang , Junyan Zhu , Yanwen Zhang , Xiaodong Yang , Zhihong Feng\",\"doi\":\"10.1016/j.micrna.2025.208234\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>This work firstly reports the high-frequency GaN planar Schottky barrier diodes (SBDs) for 220 GHz mixer applications, while conducting a systematic investigation into the design and optimization of device frequency performance through advanced device-level simulations. To enhance the cutoff frequency characteristics, device-level Sentaurus-TCAD simulation were employed to establish the quantitative relationship between critical structural parameters (N-GaN layer thickness and anode size) and key electrical parameters (series resistance <em>R</em><sub>s</sub> and zero-bias junction capacitance <em>C</em><sub>j0</sub>). Results reveal that the reduction of the N-GaN layer thickness combined with optimal anode size enables significant improvement in cutoff frequency, achieving theoretical values nearly 4 THz. Guided by these simulations, the device fabricated within current fabrication capabilities achieved a 31.55 Ω <em>R</em> and 2.1 fF <em>C</em><sub>j0</sub> with a 50 nm N-GaN layer thickness and a 0.5 μm anode radius, producing a high cutoff frequency of 2.41 THz. Finally, the SBD fabricated based on simulation was embedded in a quartz based microstrip circuit for testing. The mixer exhibits good millimeter-wave performance with a conversion loss (CL) below 18 dB across 210–224 GHz and an input 1 dB compression point (<em>P</em><sub>in1dB</sub>) of 2 dBm at room temperature, confirming excellent linearity characteristics. This work establishes following advancements, including the development of a TCAD-based simulation framework for optimizing parasitic parameters and cutoff frequency in GaN SBDs, and the demonstration of high-frequency GaN SBDs’ potential in terahertz mixer systems, providing a novel methodology for advancing GaN technology in terahertz applications.</div></div>\",\"PeriodicalId\":100923,\"journal\":{\"name\":\"Micro and Nanostructures\",\"volume\":\"206 \",\"pages\":\"Article 208234\"},\"PeriodicalIF\":3.0000,\"publicationDate\":\"2025-06-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Micro and Nanostructures\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S2773012325001633\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, CONDENSED MATTER\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Micro and Nanostructures","FirstCategoryId":"1085","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S2773012325001633","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, CONDENSED MATTER","Score":null,"Total":0}
Design of GaN SBD with high cutoff frequency for THz mixer applications
This work firstly reports the high-frequency GaN planar Schottky barrier diodes (SBDs) for 220 GHz mixer applications, while conducting a systematic investigation into the design and optimization of device frequency performance through advanced device-level simulations. To enhance the cutoff frequency characteristics, device-level Sentaurus-TCAD simulation were employed to establish the quantitative relationship between critical structural parameters (N-GaN layer thickness and anode size) and key electrical parameters (series resistance Rs and zero-bias junction capacitance Cj0). Results reveal that the reduction of the N-GaN layer thickness combined with optimal anode size enables significant improvement in cutoff frequency, achieving theoretical values nearly 4 THz. Guided by these simulations, the device fabricated within current fabrication capabilities achieved a 31.55 Ω R and 2.1 fF Cj0 with a 50 nm N-GaN layer thickness and a 0.5 μm anode radius, producing a high cutoff frequency of 2.41 THz. Finally, the SBD fabricated based on simulation was embedded in a quartz based microstrip circuit for testing. The mixer exhibits good millimeter-wave performance with a conversion loss (CL) below 18 dB across 210–224 GHz and an input 1 dB compression point (Pin1dB) of 2 dBm at room temperature, confirming excellent linearity characteristics. This work establishes following advancements, including the development of a TCAD-based simulation framework for optimizing parasitic parameters and cutoff frequency in GaN SBDs, and the demonstration of high-frequency GaN SBDs’ potential in terahertz mixer systems, providing a novel methodology for advancing GaN technology in terahertz applications.