探讨空气退火对硫化锌薄膜的影响,以增强紫外光探测在环境监测中的应用

IF 2.8 3区 物理与天体物理 Q2 PHYSICS, CONDENSED MATTER
Naveed Afzal , Anas A. Ahmed , Mohsin Rafique , Sadia Bilal , Hamdan A.S. Al-Shamiri , Ahlaam T. Nomaan , Amani M. Alansi , Talal F. Qahtan
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引用次数: 0

摘要

采用射频磁控溅射技术在p型硅衬底上沉积了硫化锌(ZnS)薄膜,并在125 ~ 500℃的空气中退火。XRD和XPS证实了ZnS-ZnO混合相在沉积过程中和沉积后由于氧化作用逐渐形成。AFM分析表明,经退火处理后,薄膜保持了光滑的形貌。光学带隙在250°C时从~ 3.54 eV(未退火)增加到~ 3.89 eV,然后在500°C时由于相变和缺陷形成而下降到~ 3.42 eV。由未退火和退火薄膜制备的光电二极管均表现出典型的pn结行为。该器件在500℃退火后,在1.22 mW/cm2的365 nm光照射下表现出增强的紫外光探测能力,灵敏度为1.16 × 104%,响应率为0.6 a /W,上升/下降时间为0.17/0.26 s。这些结果表明,空气退火是一种简单而环保的策略,可以提高用于紫外光电探测器的ZnS薄膜的光电性能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Exploring the impact of air annealing on zinc sulfide thin films for enhancing ultraviolet photodetection in environmental monitoring applications
Zinc sulfide (ZnS) thin films were deposited on p-type silicon substrates using RF magnetron sputtering and annealed in air between 125 °C and 500 °C. XRD and XPS confirmed the gradual formation of ZnS–ZnO mixed phases due to oxidation during and after deposition. AFM showed that the films retained a smooth morphology after post-annealing. The optical band gap increased from ∼3.54 eV (unannealed) to ∼3.89 eV at 250 °C, then dropped to ∼3.42 eV at 500 °C due to phase transformation and defect formation. Photodiodes fabricated from both unannealed and annealed films showed typical p–n junction behavior. The device annealed at 500 °C exhibited enhanced UV photodetection under 365 nm light exposure at 1.22 mW/cm2, with a sensitivity of 1.16 × 104 %, responsivity of 0.6 A/W, and rise/fall times of 0.17/0.26 s. These results demonstrate that air annealing is a simple and eco-friendly strategy to enhance the optoelectronic properties of ZnS films for UV photodetector applications.
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来源期刊
Physica B-condensed Matter
Physica B-condensed Matter 物理-物理:凝聚态物理
CiteScore
4.90
自引率
7.10%
发文量
703
审稿时长
44 days
期刊介绍: Physica B: Condensed Matter comprises all condensed matter and material physics that involve theoretical, computational and experimental work. Papers should contain further developments and a proper discussion on the physics of experimental or theoretical results in one of the following areas: -Magnetism -Materials physics -Nanostructures and nanomaterials -Optics and optical materials -Quantum materials -Semiconductors -Strongly correlated systems -Superconductivity -Surfaces and interfaces
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