用于高温应用的高性能电容式力传感器

IF 2.2 Q3 ENGINEERING, ELECTRICAL & ELECTRONIC
Muhannad Ghanam;Peter Woias;Frank Goldschmidtboeing
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引用次数: 0

摘要

我们提出了一种具有优异热稳定性的高量程电容式力传感器。基于以前工作的创新制造技术,一种新的传感器设计已经开发、制造、模拟和测试。该传感器被设计成一个标准的平行板电容器,由两个微结构硅芯片使用金硅共晶键合组装而成,这提供了很高的机械和热稳定性,并在测量电极周围形成了法拉第笼。与早期版本相比,通过增加中心柱,力范围大大增加,同时仍然提供相当大的基电容。在350°C和1500 N下进行的测量表明,传感器具有出色的热稳定性,无负载时温度漂移小于- 0.0008%/K(零点漂移),负载时温度漂移小于- 0.0025%满量程(FS)/K在350°C下。该传感器实现了高线性度,在室温下的值为99.98%,在高达350°C的高温下的值为99.3%。传感器灵敏度为3.66 fF/N。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A High-Performance Capacitive Force Sensor for High-Temperature Applications
We present a high-range capacitive force sensor with exceptional thermal stability. Building on innovative manufacturing techniques from previous work, a new sensor design has been developed, fabricated, simulated, and tested. The sensor, designed as a standard parallel plate capacitor, is assembled from two microstructured silicon chips using gold–silicon eutectic bonding, which provides high mechanical and thermal stability and also forms a Faraday cage around the measurement electrodes. The force range has been drastically increased compared to earlier versions by the addition of a center post, while still providing a reasonably large base capacitance. Measurements conducted up to 350°C and 1500 N demonstrate the sensor's excellent thermal stability, with a temperature drift of less than −0.0008%/K without load (zero-point drift) and −0.0025% full scale (FS)/K under load at 350°C. The sensor achieved high linearity, with a value of 99.98% at room temperature and 99.3% at elevated temperatures up to 350°C. The sensitivity of the sensor is 3.66 fF/N.
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来源期刊
IEEE Sensors Letters
IEEE Sensors Letters Engineering-Electrical and Electronic Engineering
CiteScore
3.50
自引率
7.10%
发文量
194
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