提高深紫外区硅光电探测器响应性的硅等离子体

IF 9 1区物理与天体物理 Q1 PHYSICS, MULTIDISCIPLINARY

Physical review letters Pub Date : 2025-06-05 DOI:10.1103/physrevlett.134.226901

Yu-ichiro Tanaka, Atsushi Ono, Wataru Inami, Yoshimasa Kawata

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引用次数: 0

摘要

我们报告了硅在等离子体研究中的应用，特别是针对深紫外（DUV）应用。通过在硅表面结合周期性亚微米光栅，我们展示了一种光导硅探测器，该探测器通过表面等离子体共振（SPR）实现了对DUV光的显著增强响应。值得注意的是，即使没有金属，探测器也只在tm偏振光下表现出更高的响应性，这支持了Si激发SPR的解释。我们的演示不仅验证了硅等离子体对提高光电探测器性能的有效性，而且还介绍了在各个研究领域具有潜在应用前景的创新技术。2025年由美国物理学会出版

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Silicon Plasmonics for Enhanced Responsivity of Silicon Photodetectors in Deep-Ultraviolet Region

We report on the utilization of Si in plasmonics research, specifically targeting deep ultraviolet (DUV) applications. By incorporating periodic submicron gratings on a Si surface, we demonstrate a photoconductive Si detector with significantly enhanced responsivity to DUV light, which is achieved via surface plasmon resonance (SPR). Notably, even without a metal, the detector exhibits improved responsivity only under TM-polarized light, supporting the interpretation that Si excites SPR. Our demonstration not only validates the effectiveness of Si plasmonics for enhancing photodetector performance but also introduces innovative techniques with potential applications in various research fields.

Published by the American Physical Society

2025

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来源期刊

Physical review letters 物理-物理：综合

CiteScore

16.50

自引率

7.00%

发文量

2673

审稿时长

2.2 months

期刊介绍： Physical review letters(PRL)covers the full range of applied, fundamental, and interdisciplinary physics research topics: General physics, including statistical and quantum mechanics and quantum information Gravitation, astrophysics, and cosmology Elementary particles and fields Nuclear physics Atomic, molecular, and optical physics Nonlinear dynamics, fluid dynamics, and classical optics Plasma and beam physics Condensed matter and materials physics Polymers, soft matter, biological, climate and interdisciplinary physics, including networks