Atomic-scale protuberance induced by AFM dynamic lithography

This study aims to explore the resolution limits of mechanical machining at the atomic scale through mechanical scanning probe lithography (m-SPL) using an atomic force microscope (AFM) tip. As a robust technique, m-SPL bridges the gap between fundamental research and industrial application, for the emerging demands of atomic and close-to-atomic scale manufacturing (ACSM). Dynamic lithography, utilizing the dynamic response of the cantilever, enabled cyclic contact between the tip and surface at high frequency. The shallow groove was formed through material extrusion under significant elastic recovery and the accumulation of the pile-up. The interaction of proximity pile-ups facilitated the formation of stable protuberances with precisely defined heights. Additionally, atomic-scale heights of protuberance steps were generated through controlled energy dissipations during surface modification. These findings highlight dynamic lithography as a reliable method for investigating mechanical properties and manufacturing mechanisms under high strain rates, thereby contributing to atomic-scale manufacturing technologies.