辅助离子调制氮化钛薄膜的结构和力学性能

IF 1.4 3区物理与天体物理 Q3 INSTRUMENTS & INSTRUMENTATION

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms Pub Date : 2025-06-04 DOI:10.1016/j.nimb.2025.165756

Lili Geng , Meichen Wu , Jiayi Guo , Junhao Wan , Fanya Jin , Zhaotan Jiang , Zhi Wang

{"title":"辅助离子调制氮化钛薄膜的结构和力学性能","authors":"Lili Geng , Meichen Wu , Jiayi Guo , Junhao Wan , Fanya Jin , Zhaotan Jiang , Zhi Wang","doi":"10.1016/j.nimb.2025.165756","DOIUrl":null,"url":null,"abstract":"<div><div>Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiN<em><sub>x</sub></em> films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy <em>E<sub>a</sub></em> and current density <em>J<sub>a</sub></em> were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.</div></div>","PeriodicalId":19380,"journal":{"name":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","volume":"566 ","pages":"Article 165756"},"PeriodicalIF":1.4000,"publicationDate":"2025-06-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Structural and mechanical properties of titanium nitride films modulated by assisting ions\",\"authors\":\"Lili Geng , Meichen Wu , Jiayi Guo , Junhao Wan , Fanya Jin , Zhaotan Jiang , Zhi Wang\",\"doi\":\"10.1016/j.nimb.2025.165756\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"<div><div>Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiN<em><sub>x</sub></em> films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy <em>E<sub>a</sub></em> and current density <em>J<sub>a</sub></em> were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.</div></div>\",\"PeriodicalId\":19380,\"journal\":{\"name\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"volume\":\"566 \",\"pages\":\"Article 165756\"},\"PeriodicalIF\":1.4000,\"publicationDate\":\"2025-06-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://www.sciencedirect.com/science/article/pii/S0168583X25001466\",\"RegionNum\":3,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q3\",\"JCRName\":\"INSTRUMENTS & INSTRUMENTATION\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms","FirstCategoryId":"101","ListUrlMain":"https://www.sciencedirect.com/science/article/pii/S0168583X25001466","RegionNum":3,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q3","JCRName":"INSTRUMENTS & INSTRUMENTATION","Score":null,"Total":0}

引用次数: 0

摘要

金属氮化物超硬涂层是防止金属材料磨损和腐蚀的重要手段。本文采用双离子束沉积法制备了一系列的TiNx薄膜，其中离子溅射粒子被低能辅助离子轰击在衬底上。研究了离子能量Ea和电流密度Ja辅助沉积薄膜的晶体结构和力学性能。薄膜呈现fcc-(111)最优排列。辅助离子轰击可以进一步提高薄膜的结晶度。辅助离子还能显著提高薄膜的硬度、弹性模量、临界载荷和耐磨性等性能。结果表明，辅助离子束是制备和调节超硬氮化物涂层的一种很有前途的技术。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Structural and mechanical properties of titanium nitride films modulated by assisting ions

Metal nitride superhard coating is an important way to protect metallic materials from wear and corrosion. In this work, series of TiN_x films were prepared by dual ion beam deposition, in which ion-sputtered particles were bombarded by low energy assisting ions on substrates. The crystal structure and mechanical properties of the films deposited by assisting ion energy E_a and current density J_a were studied. The films exhibit fcc-(111) optimal alignment. Assisting ion bombardment can further enhance the crystallinity of the films. Assisting ions can also promote the performances of the hardness, elastic modulus, critical load and wear resistance of the films to a significant extend. The results show that assisting ion beam is a promising technique to fabricate and modulate the properties of superhard nitride coatings.

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来源期刊

Nuclear Instruments & Methods in Physics Research Section B-beam Interactions With Materials and Atoms 物理-核科学技术

CiteScore

2.80

自引率

7.70%

发文量

231

审稿时长

1.9 months

期刊介绍： Section B of Nuclear Instruments and Methods in Physics Research covers all aspects of the interaction of energetic beams with atoms, molecules and aggregate forms of matter. This includes ion beam analysis and ion beam modification of materials as well as basic data of importance for these studies. Topics of general interest include: atomic collisions in solids, particle channelling, all aspects of collision cascades, the modification of materials by energetic beams, ion implantation, irradiation - induced changes in materials, the physics and chemistry of beam interactions and the analysis of materials by all forms of energetic radiation. Modification by ion, laser and electron beams for the study of electronic materials, metals, ceramics, insulators, polymers and other important and new materials systems are included. Related studies, such as the application of ion beam analysis to biological, archaeological and geological samples as well as applications to solve problems in planetary science are also welcome. Energetic beams of interest include atomic and molecular ions, neutrons, positrons and muons, plasmas directed at surfaces, electron and photon beams, including laser treated surfaces and studies of solids by photon radiation from rotating anodes, synchrotrons, etc. In addition, the interaction between various forms of radiation and radiation-induced deposition processes are relevant.