采用表面对准软光刻技术制备LCE微致动器阵列

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-03-13 DOI:10.1109/JMEMS.2025.3546852

Ke Li;Jae-Jun Kim;Jayer Fernandes;Hongrui Jiang

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引用次数: 0

摘要

液晶弹性体（LCEs）通过精确的分子排列提供潜在的可编程驱动，使其成为软机器人和光学系统中微致动器的理想选择。然而，通过可扩展的微加工方法实现LCE致动器阵列的精确微尺度对准一直具有挑战性。这封信介绍了一种低成本的表面对准方法来制造LCE微致动器阵列，减少了对昂贵设备的依赖，与使用现场辅助对准方法的现有研究相比，提高了可及性和可制造性。热致动试验显示出较强的热响应性和稳定性。我们的方法提供了将LCE微致动器阵列与现代微制造工艺集成的优越方法，在MEMS和其他领域有广泛的应用前景。[2024-0192]

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Fabrication of LCE Microactuator Arrays Through Soft Lithography With Surface Alignment

Liquid crystal elastomers (LCEs) offer potentially programmable actuation through precise molecular alignment, making them ideal for microactuators in soft robotics and optical systems. However, achieving precise microscale alignment for LCE actuator arrays through scalable microfabrication approaches has been challenging. This letter introduces a low-cost surface alignment method to fabricate LCE microactuator arrays, reducing the dependency on expensive equipment, improving accessibility and manufactuarability compared to existing studies using field-assisted alignment methods. Thermal actuation tests demonstrated strong thermal responsiveness and stability. Our method offers a superior approach to integrating LCE microactuator arrays with modern microfabrication processes, promising multitudinous applications in MEMS and beyond.[2024-0192]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.