具有抑制域壁噪声的高灵敏度锯片磁场传感器

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-04-24 DOI:10.1109/JSEN.2025.3562238

Hao Wu;Wenbin Hu;Yutong Wu;Yana Jia;Wen Wang;Qinghui Yang;Feiming Bai

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引用次数: 0

摘要

作为一项新兴技术，基于表面声波（SAW）的磁场传感器具有pt级灵敏度、宽带探测能力和部署智能传感器网络的灵活性。这种类型的传感器的主要噪声是由saw和畴壁之间的相互作用引入的磁损耗。在目前的工作中，设计和制作了双模SAW延迟线型磁场传感器。测量结果表明，适当选择工作频率可以显著提高磁场灵敏度，同时降低由畴壁共振（DWR）引起的磁相位噪声。此外，调整磁膜的几何形状可以降低声表面波传播路径上的畴壁密度，从而降低磁相噪声。这些努力使优化后的器件具有超高灵敏度1630.3°/mT，低检测限（LOD）为378.2 pT/Hz ${}^{{0}。$ 10 Hz。

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Highly Sensitive SAW-Based Magnetic Field Sensors With Suppressed Domain Wall Noise

As an emerging technique, the surface acoustic wave (SAW)-based magnetic field sensors offer pT-level sensitivity, broadband detection ability, and flexibility to deploy smart sensor networks. The primary noise of this type of sensor is magnetic loss introduced by the interaction between SAWs and domain walls. In current work, dual-mode SAW delay-line-type magnetic field sensors were designed and fabricated. Our measurement results reveal that proper selection of the operation frequency can significantly increase magnetic field sensitivity while reducing magnetic phase noise due to domain wall resonance (DWR). In addition, tailoring the geometry of magnetic film can reduce domain wall density along the SAW propagation path and thus lower magnetic phase noise. These efforts lead to an optimized device with an ultrahigh sensitivity of 1630.3°/mT and a low limit of detection (LOD) of 378.2 pT/Hz

${}^{{0}.{5}}$

at 10 Hz.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice