一种与电阻式传感器耦合的MEMS谐振器，用于改进传感和驱动

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-03-06 DOI:10.1109/JMEMS.2025.3545087

Hasan Albatayneh;Mohammad Matahen;Aaron Kishlock;Danling Wang;Mohammad I. Younis

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引用次数: 0

摘要

我们提出了一种新的方法来提高电阻传感器的灵敏度，并使阈值开关能够用于驱动，提供了一种简单的二进制读出方法。该概念是基于电耦合的电阻传感器与谐振MEMS结构。结果证明了两个案例研究涉及电阻温度传感器和基于纳米复合材料Ti3C2Tx的化学电阻湿度传感器。通过跟踪屈曲附近耦合微结构的谐振频移，结果表明，与直接监测电阻传感器的电阻变化相比，温度和湿度传感器的灵敏度都有显著提高（超过5-6倍）。此外，还给出了基于非线性拉入现象将谐振器转换为可调谐开关的结果。这种开关可以简化传感器-执行器系统，并且可以用作电阻传感器的简单二进制读出方法。[2024-0216]

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A MEMS Resonator Coupled With a Resistive Sensor for Improved Sensing and Actuation

We present a new approach to enhance the sensitivity of resistive sensors and enable threshold switching that can be used for actuation, providing a simple binary readout method. The concept is based on electrically coupling a resistive sensor with a resonant MEMS structure. Results are demonstrated for two case studies involving a resistive temperature sensor and a chemiresistive humidity sensor based on the nanocomposite material Ti3C2Tx. By tracking the resonance frequency shifts of the coupled microstructure operated near buckling, the results show significant sensitivity enhancement (more than 5-6 times) for both the temperature and humidity sensors compared to directly monitoring the resistance changes of the resistive sensors. Furthermore, results are shown for the conversion of the resonator into a tunable electrical switch based on the nonlinear pull-in phenomenon. Such a switch can simplify sensor-actuator systems and can be used as a simple binary readout method for resistive sensors.[2024-0216]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.