具有纳瓦功率分辨率的高刚度悬浮微热计的设计、制造和表征

IF 3.1 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

Journal of Microelectromechanical Systems Pub Date : 2025-03-05 DOI:10.1109/JMEMS.2025.3543201

Cedric Shaskey;Amun Jarzembski;Milo Birdwell;Keunhan Park

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引用次数: 0

摘要

这项工作提出了设计、制造和表征创新的悬浮微热量计量身定制的纳米级传热研究。这些器件解决了热阻和刚度关键因素之间的关键权衡，以在承受近接触力的同时实现纳瓦功率分辨率。该微热量计采用新颖的三维u型梁结构，热阻为$（1.555 \pm 0.002） × 10^{6}$ K/W，刚度为52.5 N/m。该设计在直流模式下实现8.4 nW的功率分辨率，使其非常适合探索亚纳米间隙和原子结之间的纳米级传热现象。这些器件的性能为纳米尺度传热领域开辟了新的实验可能性。(2024 - 0194)

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Design, Fabrication, and Characterization of High-Stiffness Suspended Microcalorimeters With Nanowatt Power Resolution

This work presents the design, fabrication, and characterization of innovative suspended microcalorimeters tailored for nanoscale heat transfer studies. These devices address the critical trade-off between thermal resistance and stiffness-key factors for achieving nanowatt power resolution while withstanding near-contact forces. By employing a novel three-dimensional U-beam structure, the microcalorimeter achieves a thermal resistance of

$(1.555 \pm 0.002)\times 10^{6}$

K/W and a stiffness of 52.5 N/m. This design enables a power resolution of 8.4 nW in DC mode, making it highly suitable for exploring nanoscale heat transfer phenomena across sub-nanometer gaps and atomic junctions. The performance of these devices opens new experimental possibilities in the field of heat transfer at the nanoscale. [2024-0194]

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来源期刊

Journal of Microelectromechanical Systems 工程技术-工程：电子与电气

CiteScore

6.20

自引率

7.40%

发文量

115

审稿时长

7.5 months

期刊介绍： The topics of interest include, but are not limited to: devices ranging in size from microns to millimeters, IC-compatible fabrication techniques, other fabrication techniques, measurement of micro phenomena, theoretical results, new materials and designs, micro actuators, micro robots, micro batteries, bearings, wear, reliability, electrical interconnections, micro telemanipulation, and standards appropriate to MEMS. Application examples and application oriented devices in fluidics, optics, bio-medical engineering, etc., are also of central interest.