Resonance suppression of a piezo-actuated nanopositioning stage based on recursive positive velocity feedback control

The piezo-actuated nanopositioning stage is widely used in the applications requiring precise motion and control at the nanometer level, which determines whether the system is capable of high precision and fast response. In order to suppress the low-damping resonance of the one-dimensional nanopositioning stage, this paper proposes a novel dual-loop control method that combines recursive positive velocity feedback (RPVF) control and displacement tracking control. The RPVF-based inner control loop is proposed to mitigate the resonance mode of the nanopositioning stage, and the softplus function and simulated annealing are used to improve the flamingo search algorithm for parameter configuration. The proportional–integral (PI) controller is introduced in the outer loop to overcome the problems remain in the system after vibration compensation, such as hysteresis and creep. The experimental results show that the proposed controller combining RPVF and PI effectively suppresses the low-damping resonance modes of the nanopositioning stage and achieves outstanding performance in control bandwidth, step response and trajectory tracking.