一种基于聚合物的MEMS扬声器,具有由PZT薄膜驱动的部分加强膜。

Romain Liechti, Christel Dieppedale, Timothée Rotrou, Gwenaël Le Rhun
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引用次数: 0

摘要

小型化扬声器与可穿戴和透明电子产品的关系越来越密切,但实现一致的声学性能,特别是在低频下,仍然是一个挑战。在这里,我们展示了一个基于聚合物的扬声器,其特征是由锆钛酸铅转移薄膜驱动的部分硬化膜。柔性聚合物降低了整体刚度,而局部刚度使频率响应变宽。压电薄膜通过采用供体衬底的转移过程集成。我们通过电气、机械、声学和光学测量,包括声压级和共振频率,在开放场地和入耳条件下评估其功能。结果证实了该装置在不同声载荷下工作的能力,并证明了制造工艺与柔性和透明基板的兼容性。这种方法可以集成透明压电致动器,适用于紧凑、可弯曲和光学透明的音频系统。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A polymer-based MEMS loudspeaker featuring a partially stiffened membrane actuated by a PZT thin film.

Miniaturized loudspeakers are increasingly relevant for wearable and transparent electronics, but achieving consistent acoustic performance, particularly at low frequencies, remains a challenge. Here we show a polymer-based loudspeaker that features a partially stiffened membrane actuated by a transferred thin film of lead zirconate titanate. The flexible polymer reduces overall stiffness, while the localized stiffening broadens the frequency response. The piezoelectric film is integrated through a transfer process that employs a donor substrate. We evaluate functionality through electrical, mechanical, acoustic, and optical measurements, including sound pressure level and resonance frequency, in both open field and in-ear conditions. The results confirm the device's ability to operate under different acoustic loads and demonstrate compatibility of the fabrication process with flexible and transparent substrates. This approach enables the integration of transparent piezoelectric actuators and is suitable for compact, bendable, and optically transparent audio systems.

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