锗(110)上单晶石墨烯晶片外延过程中错取向畴的二次成核

IF 15.8 1区 材料科学 Q1 CHEMISTRY, MULTIDISCIPLINARY
ACS Nano Pub Date : 2025-05-29 DOI:10.1021/acsnano.5c04786
Robert M. Jacobberger, Zichun Miao, Ka-Man Yu, Yin Hei Lam, Zizhong Li, Yangchen He, Jia Wang, Katherine A. Su, Yashwrdhan Pathaare, Vivek Saraswat, Daniel A. Rhodes, Max G. Lagally, Michael S. Altman, Michael S. Arnold
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引用次数: 0

摘要

在技术重要的衬底上进行单晶石墨烯的晶圆级合成是阻碍下一代器件开发的主要挑战,这些器件利用了单晶石墨烯的特殊电子、热学和机械性能。本文阐明了控制石墨烯外延生长在Ge(110)上的畴取向的因素,并利用这一见解来生产具有最小多结晶度的石墨烯。在生长的早期阶段,大多数石墨烯岛具有单向排列的晶格。然而,我们发现了一种二次成核现象,在这种现象中,取向错误的石墨烯畴在岛状边缘附近成核,导致晶界缺陷,并在整个生长过程中显著增加了多晶度。我们发现,当岛屿在Ge台阶上生长时,会发生二次成核,这是由于岛屿生长与Ge表面形貌演化相互作用而形成的。开发了抑制二次成核的策略,使石墨烯的主要晶体取向具有高覆盖率(gt;99%)和低旋转展(lt;0.6°)。这项工作克服了文献中报道的石墨烯在Ge(110)上外延的不可重复性,为在技术上有用的半导体上大面积合成单晶石墨烯提供了一条途径。
本文章由计算机程序翻译,如有差异,请以英文原文为准。

Overcoming Secondary Nucleation of Misoriented Domains during Wafer-Scale Epitaxy of Single-Crystal Graphene on Ge(110)

Overcoming Secondary Nucleation of Misoriented Domains during Wafer-Scale Epitaxy of Single-Crystal Graphene on Ge(110)
The wafer-scale synthesis of single-crystal graphene on technologically important substrates is a major challenge inhibiting the development of next-generation devices that harness the exceptional electronic, thermal, and mechanical properties of single-crystal graphene. Here, the factors controlling the domain orientation of graphene grown epitaxially on Ge(110) are elucidated, and this insight is utilized to produce graphene with minimal polycrystallinity. In the early stages of growth, most graphene islands have unidirectionally aligned lattices. However, we discover a secondary nucleation phenomenon in which misoriented graphene domains nucleate near/from the island edges, introducing defective grain boundaries and significantly increasing polycrystallinity throughout growth. We find that secondary nucleation occurs when islands grow over Ge steps, which form because of an interplay between the island growth and Ge surface topography evolution. Strategies for suppressing secondary nucleation are developed, enabling the synthesis of graphene in which the predominant crystal orientation has high coverage >99% and low rotational spread <0.6°. This work overcomes the irreproducibility of graphene epitaxy on Ge(110) reported in the literature, providing a route toward the large-area synthesis of single-crystal graphene on technologically useful semiconductors.
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来源期刊
ACS Nano
ACS Nano 工程技术-材料科学:综合
CiteScore
26.00
自引率
4.10%
发文量
1627
审稿时长
1.7 months
期刊介绍: ACS Nano, published monthly, serves as an international forum for comprehensive articles on nanoscience and nanotechnology research at the intersections of chemistry, biology, materials science, physics, and engineering. The journal fosters communication among scientists in these communities, facilitating collaboration, new research opportunities, and advancements through discoveries. ACS Nano covers synthesis, assembly, characterization, theory, and simulation of nanostructures, nanobiotechnology, nanofabrication, methods and tools for nanoscience and nanotechnology, and self- and directed-assembly. Alongside original research articles, it offers thorough reviews, perspectives on cutting-edge research, and discussions envisioning the future of nanoscience and nanotechnology.
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