柔性丝网印刷硅基湿度传感器。

Arjun Wadhwa, Alexandre Perrotton, Mohamad Hassan Taherian, Abbas Zirakjou, Jaime Benavides-Guerrero, Mathieu Gratuze, Fabrice Vaussenat, Martin Bolduc, Sylvain G Cloutier
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引用次数: 0

摘要

湿度传感器是现代技术的重要组成部分,涵盖从家用电器到物联网(IoT)的应用。然而,传统的商用传感器通常是刚性的,受相对湿度(%RH)工作范围的限制,并且需要复杂的制造工艺。在这项研究中,我们提出了一种高灵敏度的基于立方碳化硅(3C-SiC)纳米颗粒的相对湿度传感器,通过丝印印刷在5 mil厚的柔性聚酰亚胺(Kapton®)衬底上制造。设备在环境温度下在10-90%相对湿度的广泛湿度范围内进行测试,并在受控湿度室中评估其性能。该传感器具有45.2%的R/R0响应,灵敏度为5.34 Ω/%RH,吸附时间为18秒,解吸时间为46秒。此外,该装置在60%RH下具有6.5%的低迟滞,在连续循环3.5小时内具有出色的重复性和稳定性。为了展示其在实际应用中的潜力,印刷传感器被集成到商业KN95口罩中,用于监测呼吸参数,如呼吸速率。这种整合突出了未来探索人类健康监测的潜力,利用完全印刷的低成本传感设备。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Flexible screen-printed sic-based humidity sensors.

Humidity sensors are essential components in modern technology, spanning applications from residential appliances to the Internet of Things (IoT). However, conventional commercial sensors are typically rigid, constrained by narrow relative humidity (%RH) operating ranges, and require complex fabrication processes. In this study, we present a highly sensitive cubic silicon carbide (3C-SiC) nanoparticle-based relative humidity sensor, fabricated via serigraphic printing on to 5 mil thick flexible polyimide (Kapton®) substrate. Devices are tested across a broad humidity range of 10-90%RH at ambient temperature and their performance is evaluated in a controlled humidity chamber. The sensor exhibits a robust response of 45.2% R/R0, with a sensitivity of 5.34 Ω/%RH, an adsorption time of 18 seconds, and a desorption time of 46 seconds. Additionally, the device demonstrates low hysteresis of 6.5% at 60%RH, with excellent repeatability and stability over 3.5 hours of continuous cycling. To showcase their potential for real-world applications, the printed sensors are integrated into a commercial KN95 mask for monitoring respiration parameters, such as respiration rate. This integration highlights the potential for future exploration in human health monitoring, utilizing fully printed, low-cost sensing devices.

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