Expanding the Scope of Mo(III) Precursor Molecules for Vapor Phase Growth of Mo-Based Materials: Mo(III) Guanidinate.

The synthesis and characterization of tris(N,N'-di-isopropyl-2-dimethylamido-guanidinate)molybdenum(III), Mo(iPr-GND)3 is reported. This complex expands the known scope of tris(guanidinate)M(III) complexes to include Mo, and adds to the very limited knowledge of homoleptic mononuclear Mo(III) coordination complexes. Volatility of Mo(iPr-GND)3 is demonstrated via thermogravimetric analysis, hinting to potential applications as a molecular precursor for chemical vapor deposition (CVD) and atomic layer deposition (ALD). Proof of concept aerosol-assisted CVD growth with Mo(iPr-GND)3 as a single source precursor yielded MoCxNy films. Our results indicate a potential utility for Mo(iPr-GND)3 as a volatile precursor for ALD and CVD, with prospective use as a single-source precursor for growth of molybdenum nitrides and carbonitrides.