探索CH4气体对Mo/B4C多层膜结晶行为和界面结构的影响：薄膜工程的新方法

IF 4.8 2区材料科学 Q1 MATERIALS SCIENCE, CHARACTERIZATION & TESTING

Materials Characterization Pub Date : 2025-05-21 DOI:10.1016/j.matchar.2025.115197

Junjie Li , Yanyan Yuan , Jiaoling Zhao , Yuchun Tu , Hu Wang , Yun Cui , Rong Huang , Kui Yi

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引用次数: 0

摘要

界面结构和结晶行为对多层反射镜的反射率有重要影响。本研究采用磁控溅射技术制备Mo/B4C多层膜，并引入CH4气体，研究了Mo/B4C多层膜的结晶行为、界面扩散和界面粗糙度。结果表明，CH4气体的引入在一定程度上降低了Mo层的结晶度，改变了Mo层的相组成。所有样品都具有明确的周期结构。Mo层主要处于微晶或非晶状态，从而有效地降低了多层膜的界面粗糙度。此外，随着CH4气体的引入，在B4C-on-Mo界面处形成碳化钼夹层，有效地阻止了层间界面扩散。

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Exploring the impact of CH4 gas on crystallization behavior and interfacial structure in Mo/B4C multilayer films: A novel approach to thin-film engineering

Interface structure and crystallization behavior play an important role in the reflectivity of multilayer mirrors. In this study, Mo/B₄C multilayers were prepared by magnetron sputtering technology with the introduction of CH₄ gases to investigate crystallization behavior, interface diffusion, as well as interface roughness. The results indicate that the introduction of CH₄ gases reduced the crystallinity of the Mo layers to some extent and altered the phase composition. All samples possessed a well-defined periodic structure. The Mo layer was primarily in a microcrystalline or amorphous state, thereby effectively reducing the interface roughness of the multilayer film. Additionally, with the introduction of CH₄ gases, an interlayer of molybdenum carbide was formed at the B₄C-on-Mo interface, effectively preventing interface diffusion between the layers.

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来源期刊

Materials Characterization 工程技术-材料科学：表征与测试

CiteScore

7.60

自引率

8.50%

发文量

746

审稿时长

36 days

期刊介绍： Materials Characterization features original articles and state-of-the-art reviews on theoretical and practical aspects of the structure and behaviour of materials. The Journal focuses on all characterization techniques, including all forms of microscopy (light, electron, acoustic, etc.,) and analysis (especially microanalysis and surface analytical techniques). Developments in both this wide range of techniques and their application to the quantification of the microstructure of materials are essential facets of the Journal. The Journal provides the Materials Scientist/Engineer with up-to-date information on many types of materials with an underlying theme of explaining the behavior of materials using novel approaches. Materials covered by the journal include: Metals & Alloys Ceramics Nanomaterials Biomedical materials Optical materials Composites Natural Materials.