介质绝缘和保护层对233nm远紫外线led的影响

IF 2.3 3区工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Photonics Technology Letters Pub Date : 2025-04-21 DOI:10.1109/LPT.2025.3562622

Hyun Kyong Cho;Jens Rass;Jan Ruschel;Ina Ostermay;Ali Koyucuoglu;Jos E. Boschker;Tim Kolbe;Sven Einfeldt

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引用次数: 0

摘要

本文研究了介电绝缘或保护层（如SiO ${}_{\mathbf{2}}$和SiN ${}_{\mathbf {x}}$）对233 nm远紫外led性能和可靠性的影响。研究了这些层对芯片n接触退火的影响。结果表明，引入SiO ${}_{\mathbf{2}}$保护p-GaN表面和平台边缘，并结合SiN ${}_{\mathbf {x}}$的绝缘，可以提高器件性能。具有SiO ${}_{\mathbf{2}}$保护层的led在$700~^{\circ}$ C下进行n接触退火，可以提供最小的泄漏和退化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Impact of Dielectric Insulation and Protection Layers on 233 nm Far-UVC LEDs

This letter investigates the effect of dielectric insulation or protection layers such as SiO

${}_{\mathbf {2}}$

and SiN

${}_{\mathbf {x}}$

on the performance and reliability of 233 nm far-UVC LEDs. The study includes the effect of n-contact annealing of chips with these layers. Results show that introducing a protection of the p-GaN surface and mesa edges by SiO

${}_{\mathbf {2}}$

and combining it with an insulation by SiN

${}_{\mathbf {x}}$

enhances the device performance. LEDs with a SiO

${}_{\mathbf {2}}$

protection layer that undergoes an n-contact annealing at

$700~^{\circ }$

C offer minimum leakage and degradation.

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来源期刊

IEEE Photonics Technology Letters 工程技术-工程：电子与电气

CiteScore

5.00

自引率

3.80%

发文量

404

审稿时长

2.0 months

期刊介绍： IEEE Photonics Technology Letters addresses all aspects of the IEEE Photonics Society Constitutional Field of Interest with emphasis on photonic/lightwave components and applications, laser physics and systems and laser/electro-optics technology. Examples of subject areas for the above areas of concentration are integrated optic and optoelectronic devices, high-power laser arrays (e.g. diode, CO2), free electron lasers, solid, state lasers, laser materials'' interactions and femtosecond laser techniques. The letters journal publishes engineering, applied physics and physics oriented papers. Emphasis is on rapid publication of timely manuscripts. A goal is to provide a focal point of quality engineering-oriented papers in the electro-optics field not found in other rapid-publication journals.