通过材料和界面工程推进功率半导体热管理技术

IF 14 Q1 CHEMISTRY, MULTIDISCIPLINARY
Man Li, Suixuan Li, Zhihan Zhang, Chuanjin Su, Bryce Wong and Yongjie Hu*, 
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引用次数: 0

摘要

功率半导体和芯片在现代电子产品中是必不可少的,推动了从个人设备和数据中心到能源技术、汽车和互联网基础设施的应用。然而,高效散热仍然是一个关键的挑战,直接影响到它们的性能、可靠性和寿命。基于宽和超宽带隙半导体的大功率电子器件可以显示超过10 kW/cm2的功率密度,比数字电子器件高数百倍,这带来了重大的热管理挑战。解决这个问题需要先进的材料和界面工程,以及对材料物理、化学、传输动力学和各种电子、热和机械性能的全面理解。尽管热管理解决方案取得了进展,声子、电子的复杂相互作用及其与材料晶格、缺陷、边界和界面的相互作用提出了持续的挑战。本帐户重点介绍了功率半导体和芯片热管理方面的关键进展,重点介绍了我们集团最近的贡献。我们的方法解决了几个关键问题:(1)开发具有超高导热系数的材料以增强散热;(2)减少功率半导体和新兴2D材料之间的热边界阻力;(3)改善芯片和散热器之间的热接触和机械接触;(4)创新动态热管理解决方案;(5)探索未来技术的热传输和设计新原理。我们的研究理念将多尺度理论预测与实验验证相结合,以实现热管理的范式转变。通过利用第一性原理计算,最近的研究重新定义了高导热材料的传统标准。在这些见解的指导下,我们开发了砷化硼和磷化硼,其热导率高达1300 W/mK,创历史新高。通过声子带结构工程,GaN/BAs界面的TBR比GaN/金刚石界面降低了8倍以上。低TBR和高导热系数的结合显著降低了热点温度,为电力电子产品的热设计设定了新的基准。我们进一步探索了二维材料的各向异性TBR特性和扭曲石墨烯中的莫尔条纹,扩展了热设计领域。为了解决器件-散热器界面的挑战,我们开发了自组装的砷化硼复合材料,其导热系数为21 W/mK,机械顺应性极佳(~ 100 kPa)。这些复合材料为柔性电子和软机器人的热管理提供了有前途的解决方案。在动态热管理方面,我们开创了固态热晶体管的概念,使电控热流具有无与伦比的可调性,速度,可靠性和与集成电路制造的兼容性。这些创新不仅提高了热性能,而且使探索新的输运物理成为可能,提高了我们对极端条件下热能输运的基本理解。展望未来,我们将反思仍然存在的挑战,并确定进一步发展的机会。其中包括扩大高性能材料的生产规模,将热解决方案与现有制造工艺相结合,以及发现新的物理原理以激发下一代电力电子技术。通过解决这些挑战,我们的目标是激发未来的协同设计策略,使开发更高效、可靠、可持续和高性能的电子系统成为可能。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Advancing Thermal Management Technology for Power Semiconductors through Materials and Interface Engineering

Power semiconductors and chips are essential in modern electronics, driving applications from personal devices and data centers to energy technologies, vehicles, and Internet infrastructure. However, efficient heat dissipation remains a critical challenge, directly affecting their performance, reliability, and lifespan. High-power electronics based on wide- and ultrawide-bandgap semiconductors can exhibit power densities exceeding 10 kW/cm2, hundreds of times higher than digital electronics, posing significant thermal management challenges. Addressing this issue requires advanced materials and interface engineering, alongside a comprehensive understanding of materials physics, chemistry, transport dynamics, and various electronic, thermal, and mechanical properties.

Despite progress in thermal management solutions, the complex interplay of phonons, electrons, and their interactions with material lattices, defects, boundaries, and interfaces presents persistent challenges. This Account highlights key advancements in thermal management for power semiconductors and chips, with a focus on our group’s recent contributions. Our approach addresses several critical issues: (1) developing materials with ultrahigh thermal conductivity for enhanced heat dissipation, (2) reducing thermal boundary resistance between power semiconductors and emerging 2D materials, (3) improving thermal and mechanical contacts between chips and heat sinks, (4) innovating dynamic thermal management solutions, and (5) exploring novel principles of thermal transport and design for future technologies.

Our research philosophy integrates multiscale theoretical predictions with experimental validation to achieve a paradigm shift in thermal management. By leveraging first-principles calculations, the recent studies redefined traditional criteria for high-thermal-conductivity materials. Guided by these insights, we developed boron arsenide and boron phosphide, which exhibit record-high thermal conductivities of up to 1300 W/mK. Through phonon band structure engineering, we reduced TBR in GaN/BAs interfaces by over 8-fold compared to GaN/diamond interfaces. The combination of low TBR and high thermal conductivity significantly reduced hotspot temperatures, setting new benchmarks in thermal design for power electronics.

We further explored the anisotropic TBR properties of two-dimensional materials and Moiré patterns in twisted graphene, expanding the thermal design landscape. To address challenges at device–heat sink interfaces, we developed self-assembled boron arsenide composites with a thermal conductivity of 21 W/mK and exceptional mechanical compliance (∼100 kPa). These composites provide promising solutions for thermal management in flexible electronics and soft robotics.

In dynamic thermal management, we pioneered the concept of solid-state thermal transistors, enabling electrically controlled heat flow with unparalleled tunability, speed, reliability, and compatibility with integrated circuit fabrication. These innovations not only enhance thermal performance but also enable the exploration of novel transport physics, improving our fundamental understanding of thermal energy transport under extreme conditions.

Looking forward, we reflect on remaining challenges and identify opportunities for further advancements. These include scaling up the production of high-performance materials, integrating thermal solutions with existing manufacturing processes, and uncovering new physics to inspire next-generation power electronics technologies. By addressing these challenges, we aim to inspire future codesign strategies that enable the development of more efficient, reliable, sustainable, and high-performance electronic systems.

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