降低MEMS纤毛水听器低频损耗的优化封装设计

IF 4.3 2区综合性期刊 Q1 ENGINEERING, ELECTRICAL & ELECTRONIC

IEEE Sensors Journal Pub Date : 2025-04-03 DOI:10.1109/JSEN.2025.3555804

Zimeng Guo;Guojun Zhang;Ruimin Zhang;Yuhao Huang;Jiangjiang Wang;Wenqing Zhang;Wendong Zhang

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引用次数: 0

摘要

为了减轻MEMS纤毛水听器中充油封装造成的低频损耗，本研究提出了一种新的MEMS矢量水听器帽设计。该设计将不锈钢网帽（SSMC）结构与聚苯乙烯薄膜沉积技术相结合，有效地聚焦声音。通过仿真分析确定了水听器盖的最佳尺寸。实验结果表明，与充油封装相比，水听器盖与聚对二甲苯膜的组合在低频（2080 Hz）范围内的灵敏度提高了18 db，工作带宽为20630 Hz。

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Optimized Encapsulation Design for Reducing Low-Frequency Loss in MEMS Ciliary Hydrophones

To mitigate the low-frequency loss caused by oil-filled encapsulation in MEMS ciliary hydrophones, this study proposes a novel MEMS vector hydrophone cap design. The design incorporates a stainless-steel mesh cap (SSMC) structure combined with polystyrene thin-film deposition technology, effectively focusing sound. Simulation analyses were conducted to determine the optimal dimensions for the hydrophone cap. Experimental results show that the combination of the hydrophone cap and parylene film achieves an 18-dB sensitivity improvement in the low-frequency range (2080 Hz) compared to oil-filled encapsulation, with an operational bandwidth of 20630 Hz.

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来源期刊

IEEE Sensors Journal 工程技术-工程：电子与电气

CiteScore

7.70

自引率

14.00%

发文量

2058

审稿时长

5.2 months

期刊介绍： The fields of interest of the IEEE Sensors Journal are the theory, design , fabrication, manufacturing and applications of devices for sensing and transducing physical, chemical and biological phenomena, with emphasis on the electronics and physics aspect of sensors and integrated sensors-actuators. IEEE Sensors Journal deals with the following: -Sensor Phenomenology, Modelling, and Evaluation -Sensor Materials, Processing, and Fabrication -Chemical and Gas Sensors -Microfluidics and Biosensors -Optical Sensors -Physical Sensors: Temperature, Mechanical, Magnetic, and others -Acoustic and Ultrasonic Sensors -Sensor Packaging -Sensor Networks -Sensor Applications -Sensor Systems: Signals, Processing, and Interfaces -Actuators and Sensor Power Systems -Sensor Signal Processing for high precision and stability (amplification, filtering, linearization, modulation/demodulation) and under harsh conditions (EMC, radiation, humidity, temperature); energy consumption/harvesting -Sensor Data Processing (soft computing with sensor data, e.g., pattern recognition, machine learning, evolutionary computation; sensor data fusion, processing of wave e.g., electromagnetic and acoustic; and non-wave, e.g., chemical, gravity, particle, thermal, radiative and non-radiative sensor data, detection, estimation and classification based on sensor data) -Sensors in Industrial Practice