Design and Fabrication of Accelerometer Based on Atomic Force Microscope Measurement Principle

This article introduces a new accelerometer based on the measurement principle of atomic force microscopy (AFM). Through the structural design of micro-cantilever arrays with different stiffness coefficients, both high resolution and large dynamic range of acceleration detection can be realized theoretically. The simulation results show that the acceleration sensor can achieve 700 ng−3 g acceleration detection. The experimental results show that the operating bandwidth of the accelerometer is 570 Hz, the background noise is 700 ng/ $\surd $ Hz, the bias instability is 10 ng, and the acceleration dynamic detection range is ±3 g. This scheme proves the feasibility of the accelerometer based on AFM principle, and provides a new way for the development and application of large dynamic range and high-resolution accelerometers.