基于X-cut LNOI声学平台的超高机电耦合剪切水平型表面声波谐振器

IF 3.5 2区物理与天体物理 Q2 PHYSICS, APPLIED

Applied Physics Letters Pub Date : 2025-05-16 DOI:10.1063/5.0257796

Tiancheng Luo, Qibin Zeng, Weifan Cai, Zhi Shiuh Lim, Shengwei Zeng, Samantha Faye Duran Solco, Zhen Ye, Chee Kiang Ivan Tan, Seeram Ramakrishna, Huajun Liu

{"title":"基于X-cut LNOI声学平台的超高机电耦合剪切水平型表面声波谐振器","authors":"Tiancheng Luo, Qibin Zeng, Weifan Cai, Zhi Shiuh Lim, Shengwei Zeng, Samantha Faye Duran Solco, Zhen Ye, Chee Kiang Ivan Tan, Seeram Ramakrishna, Huajun Liu","doi":"10.1063/5.0257796","DOIUrl":null,"url":null,"abstract":"Shear horizontal surface acoustic wave resonators (SH-SAWRs) based on lithium niobate thin films on insulator (LNOI) platforms exhibit high electromechanical coupling and hold significant potential for applications in devices operating at frequencies exceeding gigahertz (GHz). This work presents the SH-SAWR with a resonance frequency of 2 GHz and high effective electromechanical coupling coefficient (keff2) of up to 42%. Finite element analysis (FEA) and theoretical studies were combined to optimize the structural parameters of the device for higher keff2 and larger quality (Q) factor, with the measured results effectively validating the proposed designs. Compared to devices without grating reflectors (GRs), the Q factor can be increased by over twofold with floating GRs and by threefold with grounded GRs. Our results show the outstanding performance of SAW resonators based on LNOI, promising for ultrawideband wireless communications.","PeriodicalId":8094,"journal":{"name":"Applied Physics Letters","volume":"120 1","pages":""},"PeriodicalIF":3.5000,"publicationDate":"2025-05-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Shear horizontal mode surface acoustic wave resonator with ultra-high electromechanical coupling based on the X-cut LNOI acoustic platform\",\"authors\":\"Tiancheng Luo, Qibin Zeng, Weifan Cai, Zhi Shiuh Lim, Shengwei Zeng, Samantha Faye Duran Solco, Zhen Ye, Chee Kiang Ivan Tan, Seeram Ramakrishna, Huajun Liu\",\"doi\":\"10.1063/5.0257796\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Shear horizontal surface acoustic wave resonators (SH-SAWRs) based on lithium niobate thin films on insulator (LNOI) platforms exhibit high electromechanical coupling and hold significant potential for applications in devices operating at frequencies exceeding gigahertz (GHz). This work presents the SH-SAWR with a resonance frequency of 2 GHz and high effective electromechanical coupling coefficient (keff2) of up to 42%. Finite element analysis (FEA) and theoretical studies were combined to optimize the structural parameters of the device for higher keff2 and larger quality (Q) factor, with the measured results effectively validating the proposed designs. Compared to devices without grating reflectors (GRs), the Q factor can be increased by over twofold with floating GRs and by threefold with grounded GRs. Our results show the outstanding performance of SAW resonators based on LNOI, promising for ultrawideband wireless communications.\",\"PeriodicalId\":8094,\"journal\":{\"name\":\"Applied Physics Letters\",\"volume\":\"120 1\",\"pages\":\"\"},\"PeriodicalIF\":3.5000,\"publicationDate\":\"2025-05-16\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Applied Physics Letters\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1063/5.0257796\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"PHYSICS, APPLIED\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Applied Physics Letters","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1063/5.0257796","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"PHYSICS, APPLIED","Score":null,"Total":0}

引用次数: 0

摘要

基于绝缘体（LNOI）平台上的铌酸锂薄膜的剪切水平表面声波谐振器（SH-SAWRs）具有高机电耦合性，在工作频率超过千兆赫（GHz）的设备中具有巨大的应用潜力。本文提出的SH-SAWR谐振频率为2 GHz，有效机电耦合系数（keff2）高达42%。将有限元分析与理论研究相结合，优化了器件的结构参数，以获得更高的keff2和更大的质量(Q)因子，实测结果有效地验证了所提出的设计。与没有光栅反射器（GRs）的设备相比，使用浮动GRs可将Q因子提高两倍以上，使用接地GRs可将Q因子提高三倍。结果表明，基于LNOI的声表面波谐振器具有优异的性能，有望用于超宽带无线通信。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

查看原文本刊更多论文

Shear horizontal mode surface acoustic wave resonator with ultra-high electromechanical coupling based on the X-cut LNOI acoustic platform

Shear horizontal surface acoustic wave resonators (SH-SAWRs) based on lithium niobate thin films on insulator (LNOI) platforms exhibit high electromechanical coupling and hold significant potential for applications in devices operating at frequencies exceeding gigahertz (GHz). This work presents the SH-SAWR with a resonance frequency of 2 GHz and high effective electromechanical coupling coefficient (keff2) of up to 42%. Finite element analysis (FEA) and theoretical studies were combined to optimize the structural parameters of the device for higher keff2 and larger quality (Q) factor, with the measured results effectively validating the proposed designs. Compared to devices without grating reflectors (GRs), the Q factor can be increased by over twofold with floating GRs and by threefold with grounded GRs. Our results show the outstanding performance of SAW resonators based on LNOI, promising for ultrawideband wireless communications.

求助全文

通过发布文献求助，成功后即可免费获取论文全文。去求助

来源期刊

Applied Physics Letters 物理-物理：应用

CiteScore

6.40

自引率

10.00%

发文量

1821

审稿时长

1.6 months

期刊介绍： Applied Physics Letters (APL) features concise, up-to-date reports on significant new findings in applied physics. Emphasizing rapid dissemination of key data and new physical insights, APL offers prompt publication of new experimental and theoretical papers reporting applications of physics phenomena to all branches of science, engineering, and modern technology. In addition to regular articles, the journal also publishes invited Fast Track, Perspectives, and in-depth Editorials which report on cutting-edge areas in applied physics. APL Perspectives are forward-looking invited letters which highlight recent developments or discoveries. Emphasis is placed on very recent developments, potentially disruptive technologies, open questions and possible solutions. They also include a mini-roadmap detailing where the community should direct efforts in order for the phenomena to be viable for application and the challenges associated with meeting that performance threshold. Perspectives are characterized by personal viewpoints and opinions of recognized experts in the field. Fast Track articles are invited original research articles that report results that are particularly novel and important or provide a significant advancement in an emerging field. Because of the urgency and scientific importance of the work, the peer review process is accelerated. If, during the review process, it becomes apparent that the paper does not meet the Fast Track criterion, it is returned to a normal track.