光学镀膜生产中宽带监控算法的选择。

IF 3.2 2区物理与天体物理 Q2 OPTICS

Optics express Pub Date : 2025-04-07 DOI:10.1364/OE.559120

A V Tikhonravov, A N Sharov, B Romanov, S Kirpichenko, S A Sharapova, A G Yagola

{"title":"光学镀膜生产中宽带监控算法的选择。","authors":"A V Tikhonravov, A N Sharov, B Romanov, S Kirpichenko, S A Sharapova, A G Yagola","doi":"10.1364/OE.559120","DOIUrl":null,"url":null,"abstract":"Three algorithms for broadband monitoring of optical coating production are compared using computational manufacturing experiments with three fundamentally different optical coating designs. It is shown that for the optimal selection of a broadband monitoring algorithm, it is not enough to consider only the levels of thicknesses errors; it is also necessary to consider the strength of the error self-compensation mechanism. Based on this consideration, recommendations are given for choosing the optimal algorithm for monitoring different types of designs.","PeriodicalId":19691,"journal":{"name":"Optics express","volume":"33 7","pages":"16610-16619"},"PeriodicalIF":3.2000,"publicationDate":"2025-04-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"On the selection of broadband monitoring algorithms for optical coating production.\",\"authors\":\"A V Tikhonravov, A N Sharov, B Romanov, S Kirpichenko, S A Sharapova, A G Yagola\",\"doi\":\"10.1364/OE.559120\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Three algorithms for broadband monitoring of optical coating production are compared using computational manufacturing experiments with three fundamentally different optical coating designs. It is shown that for the optimal selection of a broadband monitoring algorithm, it is not enough to consider only the levels of thicknesses errors; it is also necessary to consider the strength of the error self-compensation mechanism. Based on this consideration, recommendations are given for choosing the optimal algorithm for monitoring different types of designs.\",\"PeriodicalId\":19691,\"journal\":{\"name\":\"Optics express\",\"volume\":\"33 7\",\"pages\":\"16610-16619\"},\"PeriodicalIF\":3.2000,\"publicationDate\":\"2025-04-07\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Optics express\",\"FirstCategoryId\":\"101\",\"ListUrlMain\":\"https://doi.org/10.1364/OE.559120\",\"RegionNum\":2,\"RegionCategory\":\"物理与天体物理\",\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"Q2\",\"JCRName\":\"OPTICS\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Optics express","FirstCategoryId":"101","ListUrlMain":"https://doi.org/10.1364/OE.559120","RegionNum":2,"RegionCategory":"物理与天体物理","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"Q2","JCRName":"OPTICS","Score":null,"Total":0}

引用次数: 0

摘要

采用三种完全不同的光学镀膜设计，通过计算制造实验对三种光学镀膜生产宽带监控算法进行了比较。研究表明，对于宽带监测算法的优化选择，仅考虑厚度误差的高低是不够的；还需要考虑误差自补偿机制的强度。在此基础上，提出了对不同类型设计进行监控的最佳算法选择建议。

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On the selection of broadband monitoring algorithms for optical coating production.

Three algorithms for broadband monitoring of optical coating production are compared using computational manufacturing experiments with three fundamentally different optical coating designs. It is shown that for the optimal selection of a broadband monitoring algorithm, it is not enough to consider only the levels of thicknesses errors; it is also necessary to consider the strength of the error self-compensation mechanism. Based on this consideration, recommendations are given for choosing the optimal algorithm for monitoring different types of designs.

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来源期刊

Optics express 物理-光学

CiteScore

6.60

自引率

15.80%

发文量

5182

审稿时长

2.1 months

期刊介绍： Optics Express is the all-electronic, open access journal for optics providing rapid publication for peer-reviewed articles that emphasize scientific and technology innovations in all aspects of optics and photonics.