基于oes的反应磁控溅射氧化钨电致变色涂层工艺优化控制方法

IF 5.3 2区材料科学 Q1 MATERIALS SCIENCE, COATINGS & FILMS

Surface & Coatings Technology Pub Date : 2025-05-08 DOI:10.1016/j.surfcoat.2025.132239

O. Hernandez-Rodriguez , G. Guzman , R. Ortiz , E. Zuza , V. Bellido-Gonzalez , I. Quintana , E. G-Berasategui

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引用次数: 0

摘要

本研究对溅射工艺参数、光学发射光谱（OES）过程监测与WOx薄膜电致变色性能之间的关系进行了开创性的研究。通过对W发射谱线的监测，确定了制备高性能电致变色涂层的最佳工艺配置。在不同的溅射工艺参数、不同的功率和工艺压力下，对WOx涂层的微观结构和电致变色性能进行了研究。在低压和低功率的情况下，可以最大限度地提高涂层的性能。这种工艺配置导致了粗糙的WOx薄膜的沉积，避免了涂层表面的裂纹形成，这强烈影响了它们的电致变色行为。在这些条件下，沉积的WOx涂层具有高达73%的光学调制和34 cm2/C的着色效率。OES实时监测提高了对溅射过程的控制和理解，是反应磁控溅射涂层未来数字化的重要工具。因此，该方法通过解决电致变色器件生产中的质量控制、工艺优化和偏差检测问题，为提高效率提供了有价值的指导。

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OES-based control methodology for process optimization of WOx electrochromic coatings deposited by reactive magnetron sputtering

This research presents a pioneering study on the correlation between sputtering process parameters, optical emission spectroscopy (OES) process monitoring, and electrochromic properties of WO_x thin films. The study established a procedure to determine the optimal process configuration to deposit high-performance electrochromic coatings through the monitoring of W emission spectral line. The microstructure, electrochromic properties of WO_x coatings were evaluated for different sputtering process parameters, varying the applied power and process pressure. The low-pressure and power scenario was found optimum to maximize the performance of the deposited WO_x coatings. This process configuration resulted in the deposition of rough WO_x thin films, avoiding crack formation on the coating surface, which strongly affects their electrochromic behavior. In these conditions, WO_x coatings with an optical modulation of up to 73 % and a colouring efficiency of 34 cm²/C were deposited. Real-time OES monitoring improves the control and understanding of the sputtering process, turning out an essential tool for the future digitization of coatings developed by reactive magnetron sputtering. Thus, this methodology provides valuable guidance to improve efficiency by addressing quality control, process optimization and deviation detection in the production of electrochromic devices.

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来源期刊

Surface & Coatings Technology 工程技术-材料科学：膜

CiteScore

10.00

自引率

11.10%

发文量

921

审稿时长

19 days

期刊介绍： Surface and Coatings Technology is an international archival journal publishing scientific papers on significant developments in surface and interface engineering to modify and improve the surface properties of materials for protection in demanding contact conditions or aggressive environments, or for enhanced functional performance. Contributions range from original scientific articles concerned with fundamental and applied aspects of research or direct applications of metallic, inorganic, organic and composite coatings, to invited reviews of current technology in specific areas. Papers submitted to this journal are expected to be in line with the following aspects in processes, and properties/performance: A. Processes: Physical and chemical vapour deposition techniques, thermal and plasma spraying, surface modification by directed energy techniques such as ion, electron and laser beams, thermo-chemical treatment, wet chemical and electrochemical processes such as plating, sol-gel coating, anodization, plasma electrolytic oxidation, etc., but excluding painting. B. Properties/performance: friction performance, wear resistance (e.g., abrasion, erosion, fretting, etc), corrosion and oxidation resistance, thermal protection, diffusion resistance, hydrophilicity/hydrophobicity, and properties relevant to smart materials behaviour and enhanced multifunctional performance for environmental, energy and medical applications, but excluding device aspects.