Research on multi-scale simulation and dynamic verification of high dynamic MEMS components in additive manufacturing

Metal Additive Manufacturing (MAM) technology has become an important means of rapid prototyping precision manufacturing of special high dynamic heterogeneous complex parts. In response to the micro-mechanical defects such as porosity issues, significant deformation, surface cracks, and challenging control of surface morphology encountered during the selective laser melting (SLM) additive manufacturing (AM) process of specialized Micro Electromechanical System (MEMS) components, multi-parameter optimization and micro powder melt pool/macro-scale mechanical properties control simulation of specialized components are conducted. The optimal parameters obtained through high-precision preparation and machining of components and static/high dynamic verification are: laser power of 110 W, laser speed of 600 mm/s, laser diameter of 75 μm, and scanning spacing of 50 μm. The density of the subordinate components under this reference can reach 99.15%, the surface hardness can reach 51.9 HRA, the yield strength can reach 550 MPa, the maximum machining error of the components is 4.73%, and the average surface roughness is 0.45 μm. Through dynamic hammering and high dynamic firing verification, SLM components meet the requirements for overload resistance. The results have proven that MEM technology can provide a new means for the processing of MEMS components applied in high dynamic environments. The parameters obtained in the conclusion can provide a design basis for the additive preparation of MEMS components.