Current advances in biocompatibility assessment for MEMS in biomedical applications

Microelectromechanical systems (MEMS) have significantly advanced biomedical applications, enabling precise control in cell culture, tissue engineering, and drug delivery by creating highly controlled microenvironments that mimic biological systems. Traditional approaches to diagnostics and tissue fabrication face challenges in precision and scalability, driving interest in MEMS-based biosensors and microfluidic devices. These technologies offer high-throughput analysis and cellular manipulation, essential for developing complex three-dimensional (3D) tissue constructs. This paper reviews advancements in MEMS biocompatibility assessment over the past 14 years (2011–2024), focusing on material selection and device design to meet regulatory and performance standards. It also evaluates in vitro and in vivo testing methods, addressing unique challenges posed by MEMS-specific characteristics such as micro-scale structures and mixed materials. Finally, this paper highlights future directions for enhancing biocompatibility, safety, and performance, paving the way for the integration of MEMS into clinical applications to address critical challenges in biomedical fields.